Microbeam analysis

Trebbia P. Quantitative elemental mapping of X-ray radiographs by ffactorial analysis of correspondence. Proc 5 th Eur.workshop on modern developments and applications in microbeam analysis, Torquay UK,149-173, 1997... 

T. Dingle and B. W. Griffiths.In Microbeam Analysis-1985 Q. T. Armstrong, ed.) San Francisco Press, San Francisco, 315, 1985. Contains examples of quantitative anal)n ical applications of LIMS. 

L. Van Vaeck and R. Gijbels. in Microbeam Analysis-1989 (P. E. Russell, ed.) San Francisco Press, San Francisco, xvii, 1989. A synopsis of laser-based mass spectrometry anal)n ical techniques. 

The second source of partitioning data is experimental equilibration of crystals and liquids followed by microbeam analysis of quenched run products. Starting materials can be natural rocks, or synthetic analogues. In either case it is customary to dope the starting material with the U-series element(s) of interest, in order to enhance analytical precision. Of course, doping levels should not be so high as to trigger trace phase saturation (e g.. 

The first nuclear microbeam with a spatial resolution of 1 pm was built by Watt et al. (1981), and the first sub-micron instrument was built by Grime et al. (1987). Khodja et al. (2001) have published a description of the nuclear microprobe at the Pierre Sue Laboratory in France, which is a national facility dedicated to microbeam analysis. Its unique facility is that it is capable of analysing radioactive samples by means of a dedicated beamline. Figure 4.1 shows a schematic diagram of the apparatus. 

Philibert, J. Tixier, R. Physical Aspects of Electron Microscopy and Microbeam Analysis, Siegel, B, M. Beaman, D. R. (ed.), Wiley, New York 1975, 333. 

Linton, R. W., Natusch, D. F. S., Williams, P., Evans, C. A., Jr., Paper 78, Tenth Annual Conference of the Microbeam Analysis Society, Las Vegas, Nevada, August, 1975. 

Zevenbergen, C Bradley, J. P., Vander Wood, T., Brown, R. S., van Reeuwijk, L. P. Schuiling, R. D. 1994a. Microanalytical investigation of mechanisms of municipal solid waste bottom ash weathering. Microbeam Analysis, 3, 125-135. 

R. D. 1994. Microanalytical investigation of mechanisms of municipal solid waste bottom ash weathering. Microbeam Analysis, 3, 125-135. 

Microbeam Analysis Providing Microdomain, Surface Structure, and Composition... 

The utility of ANNs as a pattern recognition technique in the field of microbeam analysis was demonstrated by Ro and Linton [99]. Back-propagation neural networks were applied to laser microprobe mass spectra (LAMMS) to determine interparticle variations in molecular components. Selforganizing feature maps (Kohonen neural networks) were employed to extract information on molecular distributions within environmental microparticles imaged in cross-section using SIMS. 

In this section, we describe time-resolved, local in-situ measurements of chemical potentials /, ( , f) with solid galvanic cells. It seems as if the possibilities of this method have not yet been fully exploited. We note that the spatial resolution of the determination of composition is by far better than that of the chemical potential. The high spatial resolution is achieved by electron microbeam analysis, analytical transmission electron microscopy, and tunneling electron microscopy. Little progress, however, has been made in improving the spatial resolution of the determination of chemical potentials. The conventional application of solid galvanic cells in kinetics is completely analogous to the time-dependent (partial) pressure determination as explained in Section 16.2.2. Spatially resolved measurements are not possible in this way. 

We acknowledge financial support for the University of New Mexico portion of this study from Sandia National Laboratories and from the Petroleum Research Fund of the American Chemical Society (21168-AC5). Electron Microscopy was performed at the Microbeam analysis facility within the department of Earth and Planetary Sciences, University of New Mexico. Sandia National Laboratories is funded by the United States Department of Energy under contract DE-AC04-94AL85000. 

It is expected that the geometrical dimensions of IC devices will continue to decrease through the use of electron beam and x-ray lithography. Analysis of these small geometries presents additional challenges since a tradeoff exists between analysis area, and detection limits for the microbeam analysis techniques, AES and SIMS. The other surface analysis techniques of XPS and RBS already have very limited spatial resolution with respect to the current geometrical dimensions of IC s. The fabrication of denser and more complicated IC s also increases the value of each wafer which increases the need for additional process characterization and control. The increased application of surface analysis to semiconductor problems will provide a better understanding of these processes and will stimulate the further development of instrumental surface analysis techniques. 

Yin, S. Y. Proc. 16th Nat. Conf. Microbeam Analysis Society Vail, CO, July 1981 342-378. 

Hillenkamp, F., Feigl, P., Schuler, B. Laser micromass analysis of bulk surfaces, in Microbeam Analysis (ed. Heinrich, K. F. J.) p, 359, San Francisco, San Francisco Press 1982... 

Allen, C. C. Strope, M. B., in "Proc. of 17th Annual Meeting of Microbeam Analysis Society, Phoenix, Arizona San Francisco Press San Francisco in press. 

K. Kiss, Problem solving with microbeam analysis, in Studies in Analytical Chemistry, Vol. 7, Academiai Kiado, Budapest, 1988. 

Armstrong, J. T. (1995). CITZAF A package of correction programs for the quantitative electron microbeam X-ray analysis of thick polished materials, thin films, and particles. Microbeam Analysis 4, 177-200. 

C.J. Powell, Inner-shell Ionization cross-sections, in J.R. Michael, P. Ingram (Eds.), Microbeam Analysis, Sun Francisco Press, San Francisco, 1990, pp. 13-20. 

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