Micro-nanofabrication

As it was mentioned earlier, a much larger range of micro/nanofabrication tools are utilized in the design and fabrication of micro/nanotransducers than applied in the fabrication of microfluidic systems. Standard photolithography as described above is only one of the many techniques used. Three examples will be described here the fabrication of freestanding transducers, UV-photolithography with lift-off technique for preparation of interdigitated ultramicroelectrode arrays (IDUAs), and more traditional techniques for microtransducer preparations. 

Brodie 1, Muray JJ (1992) In The Physics of Micro/Nanofabrication. Plenum, New York... 

Ion beam machining is an important nonconventional manufacturing technology used in Micro/Nanofabrication, using a stream of accelerated ions to remove the atoms on the surface of the object. 

IBM has become one of the key approaches in micro/nanofabrications for various applications, such as nano-optics, MEMS, and nanomanufacturing. 

Cui Z (2006) Micro-nanofabrication technologies and applications, chapter 5 X-ray lithography. Springer, Berlin... 

The recent progress in micro/nanofabrication technology as well as microfluidics has spurred efforts to interface chip-based separation devices with electrospray ionization mass spectrometers. As frontiers in the ability to miniaturize the mass analyzers are being extended further, an... 

This entry is just an introduction there have been numerous other developments of advanced micro /nanofabrication techniques including ion-assisted CVD electron beam etching, for example, to produce nanopores [50] and custom AFM/ STM probes for scanning electrochemical imaging [51] and materials for sensing at high temperatures and in corrosive environments. 

Z Cui (2006) Micro-Nanofabrication Tecimolc es and plications, Chapter 5 X-ray hthography. Springs-Verlag, Berlin... 

Immobilization of proteins to control tissue-surface interaction represents a more biomimetic approach to material development, in contrast to stealth materials that prevent interaction. Natural biomolecules have the dual capability of triggering specific cellular responses while their presence can prevent nonspecific adsorption. The techniques used to append biologically active moieties on surfaces can be grouped into three main categories physical micro/nanofabrication, imprinting, and direct chemical immobilization. 

Figure 1. Illustration of scaling used in general chemistry and high school outreach presentations showing natural objects, micro/nanofabrication technologies and imaging technologies. (Images adapted from AIP, IBM Corporation, and Sandia National Laboratory, SUMMIT Technologies, WWW, mems. sandia. gov)...

Z. Cui, Micro-Nanofabrication, Higher Education Press, Beijing, PR China, 2005. 

Abstract This chapter attempts to give an overview of the historical development and current progress of femtosecond laser micro-nanofabrication based on multiphoton absorption, and particular emphasis is placed on two-photon photopolymerization. Femtosec-... 

Keywords 3D lithography Two-photon photopolymerization Femtosecond laser Micro-nanodevice Micro-nanofabrication... 

Fig. 5 Illustration of two-photon absorption schemes, a stepwise TPA with an actual intermediate energy level, and b simultaneous TPA with a virtual energy level. The former could be treated as two sequential single-photon absorption processes. For femtosecond laser micro-nanofabrication, simultaneous TPA is more relevant. AU works discussed in this review are based on simultaneous TPA...

The current laser micro-nanofabrication systems stem from the conventional laser prototyping method [6]. Figure 7a illustrates its concept, and for reference, three other layered manufacturing technologies are also shown (Fig. 7b-d) [6]. 

Compared with the above micro-nanofabrication schemes, two-photon photopolymerization has unique merits ... 

Two-photon photopolymerization, as an important method of multiphoton laser micro-nanofabrication, is expected to play an essential role in producing polymer-based optoelectronic and MEMS devices. A lot of work has been done along this line as we have reviewed in the previous sections of this chapter. Future research in materials, optics and fabrication of functional devices are needed to further its use in diverse scientific research fields and industrial applications. 

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