LIGA technique

Keywords Microreactors, microsystems, LIGA technique, chemistry, biotechnology. 

Fig. 2. Mold insert in nickel for membrane micropump made by LIGA technique using multiple irradiation...

Fig. 5. Single mixer and micromixer array in nickel on copper fabricated by LIGA technique and housing. Channel width 40 pm, Materials Nickel on copper, silver and titanium diboride. The silver and nickel-on-copper micromixers were realized by electroforming, the titanium diboride micromixer was fabricated by die sinking with LIGA electrodes...

Burbaum, C., Mohr, J., Bley, P., and Ehrfeld, W., Fabrication of capacitive acceleration sensors by the LIGA technique. Sens. Actual. A, 27, 559, 1991. 

However, the ultraprecise microstructures with extreme aspect ratio could only be generated by deep X-ray lithography. Difficulties, for example, in the access to synchrotron radiation facilities have limited the commercialization of LIGA technique in mass fabrication. 

Schomburg WK, Volhner J, Bustgens B, Fahrenberg J, Hein H, Menz W (1994) Microfluidic components in LIGA technique. J Micromech Microeng 4 186-191... 

Micro-heat exchangers Chemical etching, spark erosion, UV LIGA techniques Lab-on-a-chip , microelectronics thermal control 4... 

Gebhard U, Hein H, Just E, Ruther P (1997) Combination of a fluidic micro-oscillator and micro-actuator in LIGA-technique for medical application. In Solid-State Sensors and Actuators (Transducers 97), pp 761-764... 

Fiber optical detection systems require structures with extremely high precision. Therefore the LIGA technique is a powerful tool to fulfill these requirements. LIGA structuring enables the design of a miniaturized "optical bench system". Precise positioning structures for ball lenses or fibers, for polarizers or other elements of various materials can be achieved. Figure 5 shows an optical detection system which can be used for measurements of UV-absorption or fluorescence. 

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