Interconnect scaling

Siew YK, Stucchi M, Versluijs J, Roussel P, Kunnen E, Pantouvaki M, et al. Enabling interconnect scaling with spacer-defined double patterning (SDDP). Microelectron Eng 2013 112 116-20. 

A new dimension to acid-base systems has been developed with the use of zeolites. As illustrated in Fig. XVIII-21, the alumino-silicate faujasite has an open structure of interconnected cavities. By exchanging for alkali metal (or NH4 and then driving off ammonia), acid zeolites can be obtained whose acidity is comparable to that of sulfuric acid and having excellent catalytic properties (see Section XVIII-9D). Using spectral shifts, zeolites can be put on a relative acidity scale [195]. An important added feature is that the size of the channels and cavities, which can be controlled, gives selectivity in that only... 

At the present time there exist no flux relations wich a completely sound cheoretical basis, capable of describing transport in porous media over the whole range of pressures or pore sizes. All involve empiricism to a greater or less degree, or are based on a physically unrealistic representation of the structure of the porous medium. Existing models fall into two main classes in the first the medium is modeled as a network of interconnected capillaries, while in the second it is represented by an assembly of stationary obstacles dispersed in the gas on a molecular scale. The first type of model is closely related to the physical structure of the medium, but its development is hampered by the lack of a solution to the problem of transport in a capillary whose diameter is comparable to mean free path lengths in the gas mixture. The second type of model is more tenuously related to the real medium but more tractable theoretically. 

When a model is based on a picture of an interconnected network of pores of finite size, the question arises whether it may be assumed that the composition of the gas in the pores can be represented adequately by a smooth function of position in the medium. This is always true in the dusty gas model, where the solid material is regarded as dispersed on a molecular scale in the gas, but Is by no means necessarily so when the pores are pictured more realistically, and may be long compared with gaseous mean free paths. To see this, consider a reactive catalyst pellet with Long non-branching pores. The composition at a point within a given pore is... 

Directed Oxidation of a Molten Metal. Directed oxidation of a molten metal or the Lanxide process (45,68,91) involves the reaction of a molten metal with a gaseous oxidant, eg, A1 with O2 in air, to form a porous three-dimensional oxide that grows outward from the metal/ceramic surface. The process proceeds via capillary action as the molten metal wicks into open pore channels in the oxide scale growth. Reinforced ceramic matrix composites can be formed by positioning inert filler materials, eg, fibers, whiskers, and/or particulates, in the path of the oxide scale growth. The resultant composite is comprised of both interconnected metal and ceramic. Typically 5—30 vol % metal remains after processing. The composite product maintains many of the desirable properties of a ceramic however, the presence of the metal serves to increase the fracture toughness of the composite. 

Copper electrodeposition on Au(111) Copper is an interesting metal and has been widely investigated in electrodeposition studies from aqueous solutions. There are numerous publications in the literature on this topic. Furthermore, technical processes to produce Cu interconnects on microchips have been established in aqueous solutions. In general, the quality of the deposits is strongly influenced by the bath composition. On the nanometer scale, one finds different superstmctures in the underpotential deposition regime if different counter-ions are used in the solutions. A co-adsorption between the metal atoms and the anions has been reported. In the underpotential regime, before the bulk deposition begins, one Cu mono-layer forms on Au(lll) [66]. 

The sulphide usually forms an interconnected network of particles within a matrix of oxide and thus provides paths for rapid diffusion of nickel to the interface with the gas. At high temperatures, when the liquid Ni-S phase is stable, a duplex scale forms with an inner region of sulphide and an outer porous NiO layer. The temperature dependence of the reaction is complex and is a function of gas pressure as indicated in Fig. 7.40 . A strong dependence on gas pressure is observed and, at the higher partial pressures, a maximum in the rate occurs at about 600°C corresponding to the point at which NiS04 becomes unstable. Further increases in temperature lead to the exclusive formation of NiO and a large decrease in the rate of the reaction, due to the fact that NijSj becomes unstable above about 806°C. 

Such units are used in the watches with electronic drives instead of the traditional mechanical spring driven drives. Another area where the combination function is being used is in large-scale integrated circuit unit supports where the complex interconnection requirements make a combination circuit support and printed circuit unit an attractive way to achieve high packing efficiency such as computer hardware systems. 

In turbulent flow there is a complex interconnected series of circulating or eddy currents in the fluid, generally increasing in scale and intensity with increase of distance from any boundary surface. If, for steady-state turbulent flow, the velocity is measured at any fixed point in the fluid, both its magnitude and direction will be found to vary in a random manner with time. This is because a random velocity component, attributable to the circulation of the fluid in the eddies, is superimposed on the steady state mean velocity. No net motion arises from the eddies and therefore their time average in any direction must be zero. The instantaneous magnitude and direction of velocity at any point is therefore the vector sum of the steady and fluctuating components. 

Anaya, N., et al., Copper Interconnection Technology for Silicon Large Scale Integrated Circuits,""NTTR D, 45(4) 373-8 (1996)... 

The present chapter thus far has been concerned solely with the structural features of the chain unit and its steric relations with neighboring units. It remains to consider certain aspects of the polymer structure on a larger scale, i.e., to consider the over-all pattern of interconnection of the units. 

The integration of sensing and other functions in a micro-flow system requires either monolithic, on-chip or hybrid, multi-scale approaches. Concerning the latter, Hessel and Lowe discuss the lack of compatibility of today s fluidic interfaces and report on a German project team developing a standard for micro-reactor interconnection [9, 10]. 

Situation like microelectronics decades ago impetus by analytical chemistry lab-on-a-chip - biological applications microfabrication and micro devices scale out input-output board fast and hazardous reactions plug-and-play modules interconnects non-linear synthesis growth of scientific community industry s response selected key players and their activities [217]. 

Summarizing, the output of the reactor is an integral over time and over the entire reaction space with all interconnections between different zones of the reactor. Mixing and heat- and mass-transfer conditions are usually different in various zones and the pattern of these differences as well as proportions between size of zones vary with scale. Obviously, the histories of concentrations and temperatures in the zones differ. Whether the integral outputs of laboratory and full-scale reactors differ from each other, depends on the sensitivity of the process to mixing and heat- and mass-transfer conditions. If the sensitivity is low only minor... 

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