Extreme ultraviolet mirrors

According to IC industry s roadmap, the next generation lithography will probably use exposure at 13.4 nm, in the extreme ultraviolet (EU V), for 22 nm feature size. Due to the huge absorbance of any material at this wavelength, the optics will consist of reflective mirrors, without any lenses involved. The big challenges at 13.4 nm are the new materials for photoresists and the low output of the EUV light sources. 

Soufli, S.L. Baker, D.L. Windt, E.M. Gullikson, J.C. Robinson, W.A. Podgorski, and L. Golub, Atomic force microscopy characterization of Zerodur mirror substrates for the extreme ultraviolet telescopes aboard NASA s Solar Dynamics Observatory, Appl. Opt. 46(16), 3156 3163 (2007). 

Bajt, H.N. Chapman, N. Nguygen, J. Alameda, J.C. Rohinson, M. Malinowski, E. Gullikson, A. Aquila, C. Tarrio, and S. Grantham, Design and performance of capping layers for extreme ultraviolet multilayer mirrors, Appl. Opt. 42(28), 5750 5758 (2003). 

T.E. Madey, N.S. Faradzhev, B.Y. Yakshinsky, and N. V. Edwards, Surface phenomena related to mirror degradation in extreme ultraviolet (EUV) lithography, Appl. Surf. Sci. 253, 1691 1708 (2006). 

Hollenshead and L. Klehanoff, Modeling extreme ultraviolet/H20 oxidation of ruthenium optic coatings, J. Vac. Sci. Technol. B 24,118 130 (2006) Y. Gomei, H. Takase, T. Aoki, Y. Kakutani, and M. Niihe, Scaling law in acceleration test of extreme ultraviolet lithography projection optics mirror contamination, J. Vac. Sci. Technol. B 23, 2848 2851 (2005) A.N. Broers, W.W. Molzen, J.J. Cuomo, N.D. Wittels, Electron beam fabrication of 80A metal structures, Appl. Phys. Lett. 29, 596 598 (1976). 

Mizutani, U., Yamaguchi, T., Ikuta, H. et al. 2008. Eabrication of Mo/Si multilayer mirrors for extreme ultraviolet lithography by means of superconducting bulk magnet magnetron sputtering. Physica C Superconductivity 468 1456-1460. 

Cyanoacrylates are not appropriate for the bonding of the steel parts of an automobile, because of the environments that the car will be exposed to. Those environments include such things as rain, variations in temperatnre, exposure to solvents (such as gasoline, oil, and windshield washer solntion), ozone, acid rain, salt spray, and ultraviolet light from the Sun. (A more appropriate adhesive for car parts would be an epoxy-based adhesive.) Another example of a special adhesive would be the one used to attach a new rearview mirror in an antomobile. Because the cured adhesive in this case will be exposed to wide variations in temperature and to an extremely large amonnt of nltraviolet fight from the Snn for prolonged periods of time, an adhesive formnlated specifically for these conditions should be used. 

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