EXtreme UltraViolet

Here, we shown a "conventional" system. It consists of a light source, an etched, transparent circuit diagram and a lens to focus the pattern upon the wafer which has a photoresist layer. Upon exposure, the unexposed part of the photoresist is wzished off. Sometimes, the exposed area is removed, depending upon weather the photoresist is positive or negative. Contrast this simple system with a method under development is the "Extreme Ultraviolet (EUV) system, using radiation from excited Xe gas, i.e.- 157 nm. The EUV system is shown in the following ... 

D. Attwood, Soft X-rays and Extreme Ultraviolet Radiation (Cambridge University Press, Cambridge, 1999)... 

Extrapolating properties, defined, 16 729 Extra spring copper alloys, 7 723t Extreme ambient conditions, lubrication and, 15 252-256 Extreme-case analysis, 9 547 Extreme environments, solid and liquid lubricants for, 15 256 Extremely low toxic substances, 23 113 Extreme pressure (EP) lubrication regime, 15 214. See also EP entries Extreme purity gases, analyses of, 13 468 Extreme ultraviolet lithography, 15 189-191... 

Extreme ultraviolet, soft x-ray 500 to 20 A Core electron transitions Brown (1974)... 

Ionization chambers and Geiger counters can be used for detecting extreme ultraviolet radiation. Knowledge of the ionization efficiency of the gas makes it possible to use them for measurement of absolute energy. Ultraviolet radiation also can be detected with a thermocouple, thermopile, or bolometer. 

Attwood, D.T. Soft X-Rays and Extreme Ultraviolet Radiation Principles and Applications, Cambridge University Press, New York, NY. 1999. 

Inagaki T, Hamm RN, Arakawa ET, Painter LR (1974) Optical and dielectric properties of DNA in the extreme ultraviolet. J Chem Phys 61 4246-4250... 

Figure 3 Time-resolved extreme ultraviolet spectra of carbon plasma showing H- and He-like lines. Reprinted with permission from [99] 1998, American Physical Society...

The theoretical prediction of the optical absorption profile of a solid using first-principles methods has produced results in reasonable agreement with experiment for a variety of systems [2-4], For example, several ionic crystals were studied extensively, generally using the Hartree-Fock one-electron approximation [5], through the extreme-ultraviolet. Lithium fluoride was the focus of a particularly detailed comparison [6-8], providing excellent confirmation of the applicability of the band theory of solids for optical absorption. 

Parra E, Alexeev I, Fan J, Kim KY, McNaught SJ, Milchberg HM (2000) X-ray and extreme ultraviolet emission induced by variable pulse-width irradiation of Ar and Kr clusters and droplets. Phys. Rev. E 62 R5931-R5934... 

Figure 6.12 Dramatic high-resolution image looking across the edge of the Sun. Shown here are arcs of hot gas suspended in powerful looping magnetic fields that rise above a solar active region. The image was made in the extreme ultraviolet light.

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