Double-sided roller

Fig. 14. Cross-sectional views of post-CMP cleaning using double-sided roller brushes. The two brushes roll in opposite directions to keep the wafer pressed against two rollers. The rollers are used to rotate the wafer and are withdrawn to allow the wafer to pass once the wafer is clean (a) a single-brush configuration and (b) a multiple-brush configuration.

FIGURE 16.6 Cross-sectional views of post-CMP cleaning using double-sided roller brushes (a) a single brush and (b) multiple brushes (from Ref. 26). 

Most CMP tools now feature integrated post-CMP cleaners. However, of these the vast majority are double-sided brush scrubbers. An example is the OnTrak cleaner shown in Fig. 14 and two brush types are shown in Fig. 15. Brush configurations consist of either a series of rollers [58] or opposing pancake serubbers. Typically, there are two brush stations, each of which... 

Double-sided brush scrubbing followed by a spin-rinse-dry step dominates the industry. An example of a double-sided brush scrubber is shown schematically in Fig. 16. The rollers keep the wafer positioned and rotating while the brushes dean debris from both the front and back sides of the wafer. The cleaning solution is delivered through the bristles themselves. Typically, the bristles are porous so that fresh solution can be delivered directly to the wafer and minimal amounts of debris accumulate on the brush. Increasing the down force increases the particle removal efficiency up... 

Multiple-strand roller chain is simply two or more strands of chain assembled side by side on common pins. A typical double-strand roller chain is shown in Figure 3-15. The roller links in multiple-strand roller chain are identical to those in single strand. Of course, the pin links have longer pins to accommodate the multiple strauds iu the chain. 

Shear cutting (Fig. 18 A) is effected between a rotating knife and a roller edge and results in tapes with smoothly cut edges. This method has the highest precision, but the width of the tape rolls cannot readily be changed. It is used for most rigid-film tapes and double-sided tapes. 

Double-sided tapes are used further to fix the printplates onto the printing rollers. The adhesive has to ensure that the tape is mounted easily and the plate stays down during the printing process. After finishing the plate must be easily demountable without residues. 

Fig. 62 and 63 show a rack and pinion drive for the die-holder. The die-carrier moves on two rollers running on rails which are fixed in the counterplaten and on the run-out table. The extension piece of the die-carrier consists of a tube, the top of which is cut open the end of this tube is provided with a pinion shaft which is rotated by means of a hand-wheel. The racks of the double-sided drive are fixed on the run-out table. 

In general, four types of sprockets are available for roller chains. They are steel plate without hubs, cast iron or steel with hubs on one or both sides, split type, double-duty type. 

Buckets for continuous elevators are V-shaped in cross-section and carry their maximum load when the inclination of the elevator is such that the front and rear of the buckets are inclined equally to the vertical. Single-chain and belt elevators usually are operated at about double the speed of continuous bucket elevators so their inclination does not have to be so pronounced. Double-chain elevators when run in a vertical plane have their buckets suspended between the chains, to permit the required snubbing, but inchned elevators of the standard type, when inclined, have their buckets attached to the chains on their backs. Chains should be of the short-pitch variety to avoid pulsations as they pass about the end sprockets and when handhng abrasive material likely to raise dust they should be bushed. Supporting sprockets and rollers are used on inclined elevators to prevent the loaded side sinking and interfering with the return run of the elevator. 

The model numbers represent roller diameter and width in millimeters. All machines are executed in stainless steel and feed hopper, housing, side walls, rollers and die plates or nozzles are double walled and can be tempered (heated or cooled) independently of each other. 

Surface Preparation. The first step in the imaging operation is surface preparation to enhance photoresist adhesion. Double-treated foils (DTFs) and foils laminated with the tooth side up (RTFs) require minimum surface preparation. Generally, a process through a tacky roller machine to remove dust and foreign material is adequate. For cores with standard foil with the shiny side up (non-tooth or drum side), a more aggressive treatment is needed. Common options include a conveyorized chemical cleaning and/or an abrasive... 

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