Complementary metal-oxide integration

NMOS and PMOS (p-channel MOS) transistors are used side by side in complementary metal-oxide-semiconductor (CMOS) technology to form logic elements. These structures have the advantage of extremely low power consumption and are important in ultralarge-scale integration (ULSI) and very-large-scale integration (VLSI) (13). 

Chatterjee A, Ali I, Joyner K, Mercer D, Kuehne J, Mason M, Esuivel A, Rogers D, O Brien S, Mei P, Murtaza S, Kwok SP, Taylor K, Nag S, Hames G, Hanratty M, Marchman H, Ashburn S, Chen I-C. Integration of unit processes in a shallow trench isolation module for a 0.25 pm complementary metal-oxide semiconductor technology. J Vac Sci Technol 1997 B15(6) 1936-1942. 

Miniaturization of electronic devices in integrated circuits (ICs) has both technological and physical limits. Since 30-40 years only a semiconductor technology, mostly the CMOS FET (complementary metal-oxide-semiconductor field effect transistor) and the TTL (transistor-transistor logic) technologies are used for fabrication of integrated circuits in the industrial scale. Probably the CMOS technology will be used at least in the next 10-15 years. 

The fourth link between chemistry and lithography concerns the principles governing the chemical transformations utilized in process-integration schemes that are part of the implementation of lithography in IC device fabrication. This theme, discussed in Chapter 16, explores how lithography is used to define and pattern the various front end of lithography (FEOL) and back end of lithography (BEOL) layers of a state-of-the-art Advanced Micro Devices (AMD) microprocessor based on a complementary metal-oxide semiconductor (CMOS) device. 

Integrated complementary metal oxide semiconductor-based sensors for gas... 

With the advanced development of complementary metal-oxide-semiconductors (CMOS) technology, large-scale integration (LSI) makes the parallel multi-point bio-sensing possible. The working electrodes and reference electrodes of amperometric sensor are able to be integrated on a tiny chip (e.g., 10.4 x 10.4 mm) on... 

DeBusschere and Kovacs [28] developed a portable microfluidic platform integrated with a complementary metal-oxide semiconductor (CMOS) chip which enables control of temperature as well as the capacity to measure action potentials in cardiomyocytes. When cells were stimulated with nifedipine (a calcium channel blocker), action potential activity was interrupted. Morin et al. [29] seeded neurons in an array of chambers in a microfluidic network integrated with an array of electrodes (Fig. 5b). The electrical activity of cells triggered with an electrical stimulus was monitored for several weeks. Cells in all chambers responded asynchronously to the stimulus. This device illustrates the utility of microfluidic tools that can investigate structure, function, and organization of biological neural networks. A similar study probed the electrical characteristics of neurons as they responded to thermal stimulation [30] in a microfluidic laminar flow. Neurons were seeded on an array of electrodes (Fig. 5c) which allowed for measurements of variations in action potentials when cells were exposed to different temperatures. 

---