Annealing parameters, films

Aluminum oxide, as stabilizer, 296 Anderson model of superconductivity, 2 Anisotropic conduction, oxides, 40 Anisotropic GL theory, to ana superconductors. 19 Ann type, effect on cell parameters and magnetic properties, 142 Annealing parameters, films, 238,24(y Applications, BCS theory of superconductivity, 114 Argon laser-etched patterns, thin films, 257-25Atomic structure LajCuO, 27,2, 29 orthorhombic Y-Ba-Oi-0,27,2 ... 

The stress of annealed silicide films is tensile and is normally in the range 5-15xl09 dyne/cm2. In this section we will elaborate on how stress varies with the anneal temperature and with other process parameters. First, we will discuss some device problems which result from this stress, namely, crack formation and delamination. Cracking and delamination are here defined as follows ... 

Sefcik et al. [3] studied quenched and annealed PET films with different crystallinities varying from 3-50%. They measured rotating-frame relaxation times of protons and carbons, Tip and Tip These parameters give information about molecular motions in the tens or hundreds of kilohertz range, which is a characteristic frequency range for many important motional processes in solid polymers. Sefcik et al. were particularly interested in relaxation times. Tip which, in principle, can provide information about molecular motions at specific sites within the polymer. A multiexponential behavior of the magnetization decay was observed. 

The technique consists of firing a pulsed excimer laser at a stoichiometric pellet of the material to be deposited and under suitable conditions of laser energy density, oxygen partial pressure, substrate tenperature and deposition angle, high quality films are deposited. What is remarkable about the process is the stoichiometric deposition of films adhieved by this technique. The composition of the pellet is closely reproduced in the films. A schematic of the deposition system is shown in fig. 4. The deposition and annealing parameters are shewn in table 3. 

Figure 1.40 Comparison of EEA spectra for air-annealed CdS film on FTO and CdCfi-annealed CdS film showing the effect of recrystallization on the broadening parameter.

FIGURE 20.10 (a,b) Phase images of cryo-ultramicrotomed surfaces of triblock copolymer styrene and ethylene-butylene (SEES) samples of neat material and loaded with oil (40 wt%), respectively. (c,d) Phase images of film of triblock copolymer poly(methyl methacrylate-polyisobutylene-poly(methyl methacrylate) (PMMA-PIB-PMMA) immediately after spin-casting and after 3 h annealing at 100°C, respectively. Inserts in the top left and right comers of the images show power spectra with the value stmctural parameter of microphase separation. 

Virtually all subsequent surface science-related studies on Fe oxide films have been performed using the Pt(l 1 1) surface as a metallic substrate. The established preparation procedure for well-ordered Fe oxide films on Pt(l 11) involves PVDof Fe in 1-2 M L quantities onto clean Pt(l 11), followed by annealing in oxygen at elevated temperature this process can be repeated until oxide layers of the desired thickness have been formed. The preparation of Fe oxides on Pt(l 1 1) and the morphology of the resulting films as a function of the preparation parameters as well as the properties of Fe oxides in relation to catalysis have been comprehensively reviewed by Weiss and Ranke [106]. 

Even at their best, the models are able to predict only macroscopic properties of the films, yielding no information on microscopic parameters that may affect resist performance. It is highly probable that spin casting induces some structure or preferential chain orientation into the films, or causes secondary effects such as the aggregation observed by Law. These effects are barely addressed in the currently available literature. However, some earlier works (3.17-191 on solvent (static) cast films have investigated the molecular orientation of polymer chains as well as chain relaxation due to thermal annealing. 

Figure 7.11(b) shows the reciprocal space map after a high temperature anneal of the film. The effect of this has been to precipitate ont the arsenic, resnlting in the lattice parameter of the now stochiometric matrix reverting to that of the substrate. The scattering around the layer peak, which arises from the precipitates, is circnlarly symmetric and mnch more extensive than in the substrate. 

We can conclude this section with the insight, gained from this overview of the electrical and photoconductivity properties of these films, that, in spite of the many studies already carreid out, a comprehensive and systematic study of these properties and their correlation with a wide range of deposition parameters is still needed in order to understand what determines these properties. These studies should also include postdeposition treatments— not so much annealing, which has been carried out, but surface treatments (e.g., immersion in triethanolamine), which could show the importance (or lack of it) of the crystal surface condition. 

Table 7.1 Variation of Electrical Parameters of ZnO Films with A1 Doping and Annealing Conditions... 

As noted earlier, there are numerous studies on the photoelectrochemical (PEC) properties of CD films. Many, if not most, of these studies describe the preparation of the films and some PEC properties. In such cases, rather than describe each study separately, it is more useful and efficient to tabulate the results, providing important cell parameters together with the reference. Additional relevant information will be given separately for each individual reference. However, no attempt is made to cover all the individual studies in any detail, but rather to give enough information to allow the reader to decide whether it may be worthwhile to refer to the original reference. Some studies that treat the PEC properties of these films in a more fundamental way will be discussed separately. An important issue is whether the films have been annealed or not and under what conditions annealed films usually give better performance (normally much better) than nonan-nealed ones. 

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