Ultra-precision machining

N. Taniguchi, Current status in, and future trends of, ultra-precision machining and ultrafine materials processing, Ann. CIRP 32 (2) (1983) 573-582. 

Y.N. Picard, D.P. Adams, M.J. Vasile, M.B. Ritchey, Focused ion beam-shaped microtools for ultra-precision machining of cylindrical components. Precis. Eng. 27 (2003) 59-69. 

For ultra-precision machining of ceramic fiber-reinforced aluminum, single point diamond tools are the best suited. While processing, very low surface roughness can be achieved. The surface quality depends on the orientation of the fibers from the cutting direction (Yuan et al. 1993). 

Brinksmeier E (1997) Ultraprazisionsbearbeitung (Ultra precision machining). In Weinert K (ed) Kompendium Spanende Fertigung (Compendium machining), 2nd edn. Vulkan-Verlag, Essen, pp 155-168... 

Taniguchi N (1983) Current status in and future trends of ultra precision machining and ultra-fine processing. Ann CIRP 32(2) 573-582... 

Eda, H. Ed., Design and Manufacture of Ultra Precision Machine Tool, Kogyo-chosakai Press Co (in Japanese) (1993) 75. 

Lee W, Cheung CA. Dynamic surface topography model for the prediction of nanosurface generation in ultra-precision machining. Int J Mech Sci 2001 43 961-91. 

Y. Mori, K. Yamamura, K. Yamauchi, K. Yoshii, T. Kataoka, K. Endo, K. Inagaki, H. KaMuchi, Plasma CVM (chemical vaporization machining) an ultra precision machining technique using high-pressure reactive plasma. Nanotechnology 4 (1993) 225—229. 

Inagaki, H. Kakiuchi, 1993, Plasma CVM (Chemical Vaporization Machining) An Ultra Precision Machining Technique Using High-pressure Reactive Plasma , Nanotechnology 4, 225-229. 

As a major branch of nanotribology. Thin Film Lubrication (TFL) has drawn great concerns. The lubricant him of TFL, which exists in ultra precision instruments or machines, usually ranges from a few to tens of nanometres thick under the condition of point or line contacts with heavy load, high temperature, low speed, and low viscosity lubricant. One of the problems of TFL study is to measure the him thickness quickly and accurately. The optical method for measuring the lubricant him thickness has been widely used for many years. Goher and Cameron [3] successfully used the technique of interferometry to measure elastohydrody-namic lubrication him in the range from 100 nm to 1 /rm in 1967. Now the optical interference method and Frustrated Total Reflection (FTR) technique can measure the him thickness of nm order. 

Ohmori, H., "Electrolytic In-Process Dressing (ELID) Grinding Technique for Ultra Precision Mirror Surface Machining," International Journal ofJSPE, Vol. 26, No. 4, 1992, pp. 273-278. 

Microturning of brittle materials is a very interesting method to shape optical surfaces. Commonly used machine tools are ultra precision tools. For example, a stiffness of 30 N pm at a maximum spindle frequency of 100,000 rpm is required and the radial run-out tolerance has to be below 0.2 pm. For the detection of position of interferometers with a resolution of 10 nm are used. The shaping of non-rotation symmetrical workpieces is possible using assisting tools, such as the so-called fast-tool-servo [288]. 

The application of ultra short voltage pulses between a tool electrode and a workpiece in an electrochemical environment allows the three-dimensional machining of conducting materials with sub-micrometer precision. The principle is based on the finite time constant for double-layer charging, which varies linearly with the local separation between the electrodes. During nanosecond pulses, the electrochemical reactions are confined to electrode regions in close proximity. The technique was used for local etching of copper and silicon as well as for local copper deposition. ... 

The types of equipment in which diamond crystals are used include anvils for high-pressure research (in excess of a million atmospheres or Megabar) (Fig. 90), heatsinks, bearings for precision chronometers and other ultra-sensitive electronic meters, styli for audio equipment and surface measuring instruments, hardnesstesting indenters (Fig. 91) and distance stops on machine tools. 

Ultra-small Micro End Mills, Fig. 9 (a) Precision grinding machine to manufacture (b) USM mills (Aurich et al. 2012)... 

In order to prepare samples for creep experiments, the ceramic disks were mounted in polymer epoxy and machined into dog-bone-shaped specimens using an Omax 2652, an ultra-high precision water-jet facility. 

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