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Thermally developable resists

The third class of dry-developable resists involves heating the exposed resist films in a development step. This development method does not require expensive etching tools, is therefore economical, and could alleviate the potential problem of exposure tool contamination associated with the self-developing resist systems. Many of the plasma-developable resist systems involving a relief-bake step, as discussed in Section 3.2.4.1, have the thermal development characteristics to a certain extent. In the thermally developable resist scheme, development is minimal during irradiation but completed to the substrate upon postbaking. [Pg.171]

Although carbon electrode production has been regarded as a mature business, the steady growth in demand and the need for improved electrodes has prompted ongoing development efforts in these areas (/) cost containment through raw material substitutions and process improvements (2) higher purity electrodes for those processes such as siUcon production (J) improvements in thermal shock resistance to enhance electrode performance and (4) better joining systems for prebakes. [Pg.521]

Structure—Property Relationships The modem approach to the development of new elastomers is to satisfy specific appHcation requirements. AcryUc elastomers are very powerhil in this respect, because they can be tailor-made to meet certain performance requirements. Even though the stmcture—property studies are proprietary knowledge of each acryUc elastomer manufacturer, some significant information can be found in the Hterature (18,41). Figure 3a shows the predicted according to GCT, and the volume swell in reference duid, ASTM No. 3 oil (42), related to each monomer composition. Figure 3b shows thermal aging resistance of acryHc elastomers as a function of backbone monomer composition. [Pg.476]

Non-Metallic Materials Numerous engineering thermoplastics have been commercialised including materials such as polyetherether ketone (PEEK) and polyether sulphate (PES) with much improved thermal/chemical resistance. The usage of FRP equipment has increased, and fluoropolymer lining technology/applications have come of age. Of particular interest is the development of stoved, fluoropolymer coating systems for process industry equipment. [Pg.38]

Nevertheless the euphoric optimism where these materials were allowed a huge potential in material applications has given way to a more realistic view. Nanocomposites are not a universal solution for reinforced materials. Their full potential can only be realised if every step in the added value chain is taken into account during the whole development process. From todays perspective nanocomposite materials with an improved thermal flammability resistance or improved barrier properties have the best chances to fulfil these requirements. [Pg.403]

On the other hand, following the development of hybrid combustor configurations that prevent operation of the catalyst module at temperatures above 900-1000 °C, the major drawback of metallic monoliths, namely the limited maximum operating temperature, has been overcome. Accordingly, honeycombs made of metal foils have been adopted in GT catalytic combustors in view of their excellent thermal shock resistance and thermal conductivity properties [9]. In addition, metallic substrates are a promising option for the fabrication of microcombustors. [Pg.376]

For material initially undamaged, the appropriate parameter expressing the tendency for cracks to be developed, and therefore strength to be lost, can be considered to be that for crack initiation. This has been expressed in terms of thermal stress resistance parameters.25,30,52,86-88 Kingery used the infinite slab symmetrically heated or cooled with a constant heat transfer coefficient to derive thermal shock fracture resistance parameters R, R and fusing the equations ... [Pg.373]

The relationships between the K1C and fracture surface energy are similar to each other, and generally decrease with increasing spinel content, apart from the in situ formed composites which show different microstructures and fracture paths. It is therefore clear that the development of thermal shock resistance in the magnesia-spinel composites cannot be linked to any increased fracture toughness. [Pg.389]

Reyes Sanchez, J.A. and Toledo, O.D., New developments of magnesite-chrome brick and magnesite-spinel for cement rotary kilns higher thermal shock resistance and higher coating adherence , UNITECR 89, 1989. [Pg.394]


See other pages where Thermally developable resists is mentioned: [Pg.171]    [Pg.171]    [Pg.124]    [Pg.290]    [Pg.310]    [Pg.122]    [Pg.129]    [Pg.456]    [Pg.207]    [Pg.212]    [Pg.451]    [Pg.523]    [Pg.349]    [Pg.363]    [Pg.218]    [Pg.217]    [Pg.176]    [Pg.409]    [Pg.383]    [Pg.197]    [Pg.939]    [Pg.389]    [Pg.246]    [Pg.221]    [Pg.109]    [Pg.451]    [Pg.523]    [Pg.290]    [Pg.1506]    [Pg.306]    [Pg.124]    [Pg.218]    [Pg.45]    [Pg.391]    [Pg.151]    [Pg.359]    [Pg.367]    [Pg.376]    [Pg.391]   


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Resist development

Resistance development

Thermal development

Thermal resistance

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