Slurry Characterization

Sikder et al. [27] conducted slurry characterization studies on a CMP bench-top tester. Figure 4.24 shows the COF and AE data collected during the polishing of four TEOS wafer coupons using slurry 1 and slurry 2. The AE and... 

Another example of slurry prescreening is presented here. Three batches, lot 1 (in spec) and lots 2 and 3 (under suspicion), from a commercial copper slurry were inspected by replicating the conditions of an 8-in. Mirra polisher on a bench-top tester. The bench-top results could differentiate between the good lot 1, the faulty lot 2, and the faulty lot 3 (refer to Table 4.1 for numerical data). Verification of these results on the production polisher fully confirmed the screening data, with excellent process correlation between the production and bench-top machines. Thus, tribometrology collected on bench-top testers can be useful not only in slurry characterization but also in quality control. 

What are the main objectives of CMP slurry laboratory characterization Describe various methods and levels of slurry characterization with examples of information generated from these studies. How can such data be beneficial for CMP end user as well as CMP consumable developer and slurry delivery system manufacturers ... 

Particle Size. Wet sieve analyses are commonly used in the 20 )J.m (using microsieves) to 150 )J.m size range. Sizes in the 1—10 )J.m range are analyzed by light-transmission Hquid-phase sedimentation, laser beam diffraction, or potentiometric variation methods. Electron microscopy is the only rehable procedure for characterizing submicrometer particles. Scanning electron microscopy is useful for characterizing particle shape, and the relation of particle shape to slurry stabiUty. 

In the United States, Hquid HLW from the reprocessing of defense program fuels was concentrated, neutralized with NaOH, and stored in underground, mild steel tanks pending soHdification and geologic disposal (see Tanks AND PRESSURE VESSELS). These wastes are a complex and chemically active slurry. Suspended in the supernatant Hquid are dissolver soHds which never went into solution, insoluble reaction products which formed in the tank, and salts which have exceeded their solubiHty limit. The kinetics of many of the reactions taking place are slow (years) so that the results of characterization... 

A slurry bed reactor is in a pilot stage investigation. This type is characterized by having the catalyst in the form of a slurry. The feed gas mixture is bubbled through the catalyst suspension. Temperature control is easier than the other two reactor types. An added advantage to slurry-bed reactor is that it can accept a synthesis gas with a lower H2/CO ratio than either the fixed-bed or the fluid-bed reactors. 

Bubble-column slurry operations are usually characterized by zero net liquid flow, and the particles are held suspended by momentum transferred from the gas phase to the solid phase via the liquid medium. The relationships between solids holdup and gas flow rate is of importance for design of bubble-column slurries, and some studies of this aspect will be reviewed prior to the discussion of transport phenomena. 

The liquid residence-time distribution is close to plug flow in trickle-flow operation and corresponds to perfect mixing in the stirred-slurry operation, whereas the other types of bubble-flow operation are characterized by residence-time distributions between these extremes. 

The semibatch model GASPP is consistent with most of the data published by Wisseroth on gas phase propylene polymerization. The data are too scattered to make quantitative statements about the model discrepancies. There are essentially three catalysts used in his tests. These BASF catalysts are characterized by the parameters listed in Table I. The high solubles for BASF are expected at 80 C and without modifiers in the recipe. The fact that the BASF catalyst parameters are so similar to those evaluated earlier in slurry systems lends credence to the kinetic model. 

To measure an individual particle surface interaction and its material removal effects. Because of the complexity of the polishing system, it is highly desirable to characterize the physical and chemical behavior of individual interactions while other components are fixed. AFM technology can be provided to explore slurry particle interactions with different surfaces in different liquid ambient. 

All the driers discussed above are unsuitable for mixtures with a high liquid proportion (slurries). For such mixtures spray driers (see Fig. 7.2-11) or cyclone driers (see Fig. 7.2-12) are effective. In the former the sluri-y is injected into the drier by a nozzle that atomizes the suspension. Small droplets fall down countercurrently to the hot gas that rises in the conical drier zone. In cyclone driers the sluriy and the hot gas flow cocurrently. Driers of both kinds are characterized by short residence times. Therefore, they are particularly suitable for temperature sensitive products. A significant proportion of driers of all kinds, appropriately modified, can also be operated as solids mixers and/or granulators. 

In this study butyl acetate (AcOBu) was hydrogenolysed to butanol over alumina supported Pt, Re, RePt and Re modified SnPt naphtha reforming catalysts both in a conventional autoclave and a high throughput (HT) slurry phase reactor system (AMTEC SPR 16). The oxide precursors of catalysts were characterized by Temperature-Programmed Reduction (TPR). The aim of this work was to study the role and efficiency of Sn and Re in the activation of the carbonyl group of esters. 

Patel, K.D., Jerkovich, A.D., Link, J.C., Jorgenson, J.W. (2004). In-depth characterization of slurry packed capillary columns with l.O-pm nonporous particles using reversed-phase isocratic ultrahigh-pressure liquid chromatography. Anal. Chem. 76, 5777-5786. 

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