Silicon on insulator

To manufacture an oxide layer for a SOI structure, either the local oxidation of silicon (LOCOS) process or the separation by implanted oxygen (SIMOX) 

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Japanese researchers are ahead of their U.S. counterparts in the application of laser and electron beams and solid-phase epitaxy for the fabrication of silicon-on-insulator structures. 

M.G. Nikolaides, S. Rauschenbach, S. Luber, K. Buchholz, M. Tornow, G. Abstreiter, and A.R. Bausch, Silicon-on-insulator based thin-film resistor for chemical and biological sensor applications. ChemPhysChem. 4, 1104-1106 (2003). 

Lwin MHT, Tun TN, Kim HH, Kajen RS, Chandrasekhar N, Joachim C (2010) Silicon on insulator nanoscale backside interconnects for atomic and molecular scale circuits. J Vac Sci Tech B 28 978... 

Figure 11.11. Integration of nanowire photonics with silicon electronics. Schematic illustrating fabrication of hybrid structures. A silicon-on-insulator (SOI) substrate is patterned by standard electron-beam or photolithography followed by reactive ion etching. Emissive NWs are then aligned onto the patterned SOI substrate to form photonic sources. [Reprinted with permission from Ref. 59. Copyright 2005 Wiley-VCH Verlag.]...

Roelkens, G. et al. 2005. Integration of InP/InGaAsP photodetectors onto silicon-on-insulator waveguide circuits. Opt. Express 13 10102-10108. 

Current market trends indicate a gaining momentum of corrosion and temperature-resistant MEMS devices for the use in mass market applications. Silicon-on-insulator material properties make way for a whole new range of uses and applications while being available in sufficiently large quantities to satisfy large volume production requirements. A breakthrough of these devices can be expected through automotive applications, if they can meet the price pressure. 

Progress in semiconductor processing has evolved in a number of substrate materials, pre-destined for the use in micro structured devices, such as Silicon, Silicon-on-Insulator (SOI), Silicon Carbide and Gallium Arsenide [1]. 

SOI Silicon on Insulator material is today s most advanced Silicon-based substrate technology it is basically Silicon material with an integrated insulation layer underneath a single crystal Si layer. It combines most of the advantages of the most well established Silicon technology with high radiation, media and temperature compatibility. 

Densmore, A. Xu, D. X. Waldron, P. Janz, S. Cheben, P. Lapointe, J. Delage, A. Lamontagne, B. Schmid, J. H. Post, E., A silicon on insulator photonic wire based evanes cent field sensor, IEEE Photon. Technol. Lett. 2006, 18, 2520 2522... 

Niehusmann, J. Vorckel, A. Bolivar, P. H. Wahlbrink, T. Henschel, W. Kurz, H., Ultra high quality factor silicon on insulator microring resonator, Opt. Lett. 2004, 29, 2861 2863... 

Baehr Jones, T. Hochberg, M. Walker, C. Scherer, A., High Q ring resonators in thin silicon on insulator, Appl. Phys. Lett. 2004, 85, 3346 3348... 

Xu, D. X. Janz, S. Cheben, P. Design of polarization insensitive ring resonators in silicon on insulator using MMI couplers and cladding stress engineering, IEEE Photonic Technol. 

De Vos, K. Bartolozzi, I. Schacht, E. Bienstman, P. Baets, R., Silicon on insulator microring resonator for sensitive and label free biosensing, Opt. Express 2007, 15, 7610 7615... 

Keywords Microphotonics, silicon-on-insulator, integrated optics, birefringence, silicon... 

The most common examples of high index contrast waveguides are silicon-on-insulator (SOI) waveguides, and silicon oxynitride... 

As an illustrative model, consider a rectangular silicon-on-insulator channel waveguide embedded in an oxide cladding, as shown in Figure 7. 

L. Vivien, S. Laval, B. Dumont, S. Lardenois, A. Koster, and E. Kassan, "Polarization independent single mode rib waveguides on silicon-on-insulator for telecommunications wavelengths," Opt. Commun. 210, 43-49 (2002). 

R.L. Espinola, T. Izuhara, M.-C. Tsai, R.M. Osgoode, and H. Dotsch, "Magneto-optical non-reciprocal phase shift in gamet/silicon-on-insulator waveguides," Opt. Lett. 29, 941-943 (2004). 

Progress in the design and fabrication of high-quality optical microresonators is closely related to the development of novel optical materials and technologies. The key material systems used for microresonator fabrication include silica, silica on silicon, silicon, silicon on insulator, silicon nitride and oxynitride, polymers, semiconductors such as GaAs, InP, GalnAsP, GaN, etc, and crystalline materials such as lithium niobate and calcium fluoride. Table 2 smnmarises the optical characteristics of these materials (see Eldada, 2000, 2001 Hillmer, 2003 Poulsen, 2003 for more detail). 

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