Low-voltage scanning electron microscopes

LVSEM low-voltage scanning electron microscope MTF modulation transfer function... 

Zach J 1989 Design of a high-resolution low-voltage scanning electron microscope Opf/k 83 30-40... 

Nowadays, there are so-called low-voltage scanning electron microscopes available that frequently eliminate the need to apply a conductive coating to the polymer and can permit fracture surface analyses to be performed. 

The image is formed by the signal of emitted secondary electrons, backscattered electrons. Auger electrons, absorbed specimen current (SC), or X-ray quanta, which modulate the intensity of a cathode-ray tube rastered in synchronism (Fig. 75). Conventional SEMs work with electron acceleration voltages of 5 - 30 kV, whereas a low-voltage scanning electron microscope (LVSEM) [222], [223] uses 0.5-5 kV. 

Silica microspheres used were imaged with a low-voltage scanning electron microscope (SEM) (LEO 1530 Gemini, Oberkochen, Germany) after experiments to determine their shape and size. The radii of the silica microspheres were in range of / = 3.2-S.4 ttm. The tips turned out not to be completely spherical. Therefore, their radii could not be determined accurately. Values around 60 15 run for the tips used to measure DMOAP and 50 15 run for the tips used to determine the elastic modulus of the trilayer were estimated. 

The fracture surfaces of the SINs were examined in the ETEC Autoscan Scanning Electron Microscope at a relatively low beam current and accelerating voltage of approximately 20KV. Prior to examination, the surfaces were coated with a thin evaporated layer of gold in order to improve conductivity and prevent charging. 

SEM is used to probe microstructural features from 10 nm- 1 tim A Field Emission Scanning Electron Microscope (FESEM) allows imaging of many non-conductive materials at relatively low voltages (200 eV - 30 keV) witiiout applying a conductive coating. An energy dispersive x-ray spectrometer (EDS)... 

Samples were investigated using a scanning electron microscope (FEI QUANTA 200 ESEM). Air dried samples were fixed onto aluminum stubs through carbon adhesive disks and their fractured surface was observed with a low-vacuum secondary electron detector using the accelerating voltage of 25.0 kV. The samples were analyzed at room temperature and at an internal pressure of 0.50 torr. 

In the scanning electron microscope (SEM), particularly at low voltages, the chromatic aberration is as important as the spherical aberration and an aberration corrected SEM (ACSEM) has both Cs and Q reduced to very small values... 

Marrian C R K, Perkins F K, Brandow S L, Koloski T S, Dobisz E A and Calvert J M 1994 Low voltage electron beam lithography in self-assembled ultrathin films with the scanning tunneling microscope Appi. Rhys. Lett. 64 390... 

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