SALI surface analysis by laser

RNRA, Resonant Nuclear Reaction Analysis, 35 RS Recoil Spectrometry, viz ERDA, 9 SALI Surface Analysis by Laser Ionisation, 39 SAM Scanning Auger Microscopy, 37... 

EDX Energy dispersive X-ray spectroscopy SALI Surface analysis by laser ionization... 

SALI Surface Analysis by Laser Ionization Surface e-beam, ion-beam, or laser for sputtering Sputtered atoms ionized by laser then mass analyzed 0.1-0.6 nm up to 3 pm in milling mode 60 nm Suriace analysis depth proliling 7... 

In Surface Analysis by Laser Ionization (SALI), a probe beam such as an ion beam, electron beam, or laser is directed onto a surfiice to remove a sample of material. An untuned, high-intensity laser beam passes parallel and close to but above the sur-fiice. The laser has sufficient intensity to induce a high degree of nonresonant, and hence nonselective, photoionization of the vaporized sample of material within the laser beam. The nonselectively ionized sample is then subjected to mass spectral analysis to determine the nature of the unknown species. SALI spectra accurately reflect the surface composition, and the use of time-of-flight mass spectrometers provides fast, efficient and extremely sensitive analysis. 

Some less common acronyms for laser SNMS are also used, such as sputter-initiated resonance ionization spectroscopy (SIRIS) [287] and surface analysis by laser ionization (SALI) [288]. 

In other articles in this section, a method of analysis is described called Secondary Ion Mass Spectrometry (SIMS), in which material is sputtered from a surface using an ion beam and the minor components that are ejected as positive or negative ions are analyzed by a mass spectrometer. Over the past few years, methods that post-ion-ize the major neutral components ejected from surfaces under ion-beam or laser bombardment have been introduced because of the improved quantitative aspects obtainable by analyzing the major ejected channel. These techniques include SALI, Sputter-Initiated Resonance Ionization Spectroscopy (SIRIS), and Sputtered Neutral Mass Spectrometry (SNMS) or electron-gas post-ionization. Post-ionization techniques for surface analysis have received widespread interest because of their increased sensitivity, compared to more traditional surface analysis techniques, such as X-Ray Photoelectron Spectroscopy (XPS) and Auger Electron Spectroscopy (AES), and their more reliable quantitation, compared to SIMS. 

---