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Post-deposition cleaning

Process-induced damages including plasma-induced damage (RIE), post-RIE cleaning chemistry, PVD metal deposition,... [Pg.32]

Gabrielli C, Mace C, Matha J, Mege S, Ostermann E, Perrot H. Investigation of dissolution and deposition of Copper in concentrated and dilute oxalic acid media in post-CMP cleaning. Solid State Phenom 2005 103-104 287—90. [Pg.46]

Dust Study data on containment and information on the effectiveness of HEPA vacuums show that the use of containment and post-renovation cleaning with HEPA vacuums to remove the lead-based paint dust potentially deposited on the carpets... [Pg.212]

Fig. 32. High-pressure SFG spectra of a 1 10 (molar) CO H2 mixture on Pd(l 11) (a) and on Pd/Al203 (b, c) (dS). Pressures and temperatures are indicated, (d) FEED patterns recorded before (lower) and after (upper) high-pressure gas exposure to Pd(l 11) (273). The post-reaction AE spectrum indicates that the surface remained clean during 6 h of gas exposure, (e) Schematic illustration of the reaction of on-top CO with hollow-bonded H to adsorbed formyl. (1) Cls XP spectra of smooth (perfect p ) and defect-rich ( d ) Pd(l 11), acquired with the sample in 0.05 mbar of CO + H2 the d spectrum shows an additional peak at 283.8 eV, attributed to carbonaceous deposits (324). Fig. 32. High-pressure SFG spectra of a 1 10 (molar) CO H2 mixture on Pd(l 11) (a) and on Pd/Al203 (b, c) (dS). Pressures and temperatures are indicated, (d) FEED patterns recorded before (lower) and after (upper) high-pressure gas exposure to Pd(l 11) (273). The post-reaction AE spectrum indicates that the surface remained clean during 6 h of gas exposure, (e) Schematic illustration of the reaction of on-top CO with hollow-bonded H to adsorbed formyl. (1) Cls XP spectra of smooth (perfect p ) and defect-rich ( d ) Pd(l 11), acquired with the sample in 0.05 mbar of CO + H2 the d spectrum shows an additional peak at 283.8 eV, attributed to carbonaceous deposits (324).
An old ad from The Saturday Evening Post for Boraxo, a hand-cleaning product containing sodium tetraborate (NaB407). Extensive natural deposits of borax (Na2B407 10H20) found in saline lakes near Death Valley, California, were hauled to a factory in wagons pulled by teams of 20 mules-hence the name 20 Mule Team Borax. [Pg.878]

A limited number of sink effect studies have been conducted in full-sized environments. Tichenor et al. [20] showed the effect of sinks on indoor concentrations of total VOCs in a test house from the use of a wood stain. Sparks et al. [50] reported on test house studies of several indoor VOC sources (i.e., p-dichlorobenzene moth cakes, clothes dry-cleaned with perchloroethylene, and aerosol perchloroethylene spot remover) and they were compared with computer model simulations. These test house studies indicated that small-chamber-derived sink parameters and kj) may not be applicable to full-scale, complex environments. The re-emission rate (kj) appeared to be much slower in the test house. This result was also reported by other investigators in a later study [51]. New estimates of and were provided,including estimates of fca (or deposition velocity) based on the diffusivity of the VOC molecule [50]. In a test house study reported by Guo et al. [52], ethylbenzene vapor was injected at a constant rate for 72 h to load the sinks. Re-emissions from the sinks were determined over a 50-day period using a mass-balance approach. When compared with concentrations that would have occurred by simple dilution without sinks, the indoor concentrations of ethylbenzene were almost 300 times higher after 2 days and 7 times higher after 50 days. Studies of building bake-out have also included sink evaluations. Offermann et al. [53] reported that formaldehyde and VOC levels were reduced only temporarily by bake-out. They hypothesized that the sinks were depleted by the bake-out and then returned to equilibrium after the post-bake-out ventilation period. Finally, a test house study of latex paint emissions and sink effects again showed that... [Pg.81]

Industrial production of an EMST consists of a large number of technological steps consisting of different reactions. A typical industrial production process begins with cleaning, surface treatment, and continues on with activations. The main electrochemical reactions of deposition or dissolution of metal may be continued, combined, or followed by the procedure of microstructuring and ends with post treatments. [Pg.212]

The fabrics (53 x 48 connt/cm, 140 g/m taffeta fabric) were used as substrate. The surface area of each specimen is 100 cm. The electroless copper plating process was conducted by multistep processes pre-cleaning, sensitisation, activation, electroless Cu-Ni-p alloy deposition, and post-treatment. [Pg.168]


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See also in sourсe #XX -- [ Pg.82 ]




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Post-depositional

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