Porous Silicon Sensors

Evolution of reflectivity signals over time has been used to temporally resolve the constituents of a binary vapor mixture [102]. Since the studied solvents (ethanol and acetone) have identical refractive indices, changes in the optical reflectance of porous silicon exposed to these vapors were shown to depend upon the rates of diffusion and adsorption of these species into the material. Time-resolved refrac-tometry revealed that an equimolar mixture of acetone and ethanol vapors exhibited markedly different condensation within porous silicon than did the pure mixture constituents (figure 16.14). This method is comparable to gas chromatography in that the vapor mixture interacts with the matrix in a manner dependent upon the physical properties of its components, but the porous silicon device 

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V. Lysenko, S. Perichon, B. Remaki, and D. Barbier. Thermal isolation in microsystems with porous silicon Sensors and Actuators A99 (2002), 13-24. 

Starodub VM, Fedorenko LL, Sisetskiy AP, Starodub NF (1999) Control of myoglobin level in an immune sensor based on the photoluminescence of porous silicon. Sensors and Actuator B58 409-414... 

Fig. 16.13. Photodiode voltage differences induced by response of porous silicon sensors (unfunctionalized, hydride-terminated and methyl-terminated surfaces) to pure dinitrogen (1) and 2.4% methyl ethyl ketone (MEK) in dinitrogen (2). Sensor response is indicated by a sudden increase in the potential difference. Exposure to the organic analyte induces an obvious, reversible change in potential. The...

Baratto, C.,Faglia, G, Sberveglieri, G,Gaburro,Z.,Pancheri,L.,Oton, C. and Pavesi, L. Multiparametric porous silicon sensors , (2002) Sensors, 2,121-6. 

Ouyang H, Christopherson M, Fauchet PM (2005) Enhanced control of porous silicon morphology fi"om macropore to mesopore formation. Phys Stat Solidi (a) 202(8) 1396-1401 Pacholski C (2013) Photonic crystal sensors based on porous silicon. Sensors 13 4694-4713 Roura P, Costa J (2002) Radiative thermal emission from silicon nanoparticles a reversed story from quantum to classical theory. Eur J Phys 23 191-203 Scherer WG, Smith DM, Stein D (1995) Deformation of silica aerogels during characterisation. JNon Cryst Solids 186 309-315... 

Salonen J, Tuura J, Bjorkqvist M, Lehto VP (2006) Sub-ppm trace moisture detection with a simple thermally carbonized porous silicon sensor. Sens Actuator B-Chem 114 423-426 Salonen J, Kaukonen AM, Hirvonen J, Lehto VP (2008) Mesoporous silicon in drug delivery applications. J Pharm Sci 97 632-653... 

Cobianu C, Savaniu C, Buiu O, Dascalu D, Zaharescu M, Parlog C, van den Berg A, Pecz B (1997) Tin dioxide sol-gel derived than films deposited on porous silicon. Sensor Actuators B Chem 43 114... 

Banihashemian SM, Hajghassem H, Erfanian A et al (2010) Observation and measurement of negative differential resistance on PtSi Schottky junctions on porous silicon. Sensors 10 1012-1020. doi 10.3390/sl00201012... 

Pacholski C (2013) Photonic crystal sensors based on porous silicon. Sensors 13 4694-4713... 

Saha H (2008) Porous silicon sensors - elusive and erudite. Int J Smart Sens Intel Systems... 

Baratto C, Faglia G, Comini E, Sberveglieri G, Taroni A, La Ferrara V, Quercia L, Di Francia G (2001) A novel porous silicon sensor for detection of sub-ppm N02 concentrations. Sens Actuator B 77 62-66... 

Ruminski AM, Barillaro G, Chaffin C, Sailor MJ (2011) Internally referenced remote sensors for HF and C12 using reactive porous silieon photonic crystals. Adv Funct Mater 21 1511-1525 Saha H (2008) Porous silicon sensors-elusive and erudite. IJOSSAIS l(l) 34-56 (Review)... 

Hamzah AA et al (2013) Electrochemically deposited and etched membranes with precisely sized micropores for biological fluids microfiltration. J Micromech Microeng 23 074007 Hedrich F et al (2000) Stracturing of membrane sensors using sacrificial porous silicon. Sensor Actuator 84 315-323... 

Kim S-J, Jeon BH, Choi K-S, Min N-K (2000) Capacitive porous silicon sensors for measmement of low alcohol gas concentration at room temperature. Solid State Electrochem 4 363-366 Kitsara M, Goustouiidis D, Chatzandroulis S, Beltsios K, Raptis I (2006) A lithographic polymer process sequence for chemical sensing arrays. Microelectron Eng 83 1192-1196... 

For application of protein-immobilized porous materials to sensor fields, use of an electroactive substance as the framework material is important. DeLouise and Miller demonstrated the immobilization of glutathione-S-transferase in electrochemically etched porous silicon films [134], which are attractive materials for the construction of biosensors and may also have utility for the production of immobilized enzyme bioreactors. Not limited to this case, practical applications of nanohybrids from biomolecules and mesoporous materials have been paid much attention. Examples of the application of such hybrids are summarized in a later section of this chapter. 

C. Dilcso, E. Vazsonyi, M. Adam, I. Szabo, I. Bdrsony, J.G.E. Gardeniers, and A. van den Berg. Porous silicon bulk micromachining for thermally isolated membrane formation . Sensors and Actuators A60 (1997), 235-239. 

A. Splinter, O. Bartels, and W. Benecke. Thick porous silicon formation using implanted mask technology . Sensors and Actuators B76 (2001), 354-360. 

S. Aravamudhan, A. R. A. Rahman, and S. Bhansali. Porous silicon-based orientation independent, self-priming micro direct ethanol fuel cell. Sensors Actuators A 123-124 (2005) 497-504. 

Presently, the studies on porous silicon are considered to be a very promising field for advanced research oriented in the photonic materials to make light emitting diodes (LED), and mostly as sensors and biosensors of various components in solutions as well as in gaseous phases. 

Starodub NF, Starodub VM (2002) Porous silicon some theoretical aspects and practical application as transducer for immune sensor. In Extended abstracts of the 3rd international conference porous semiconductors science and technology, Puerto de la Cruz, Tenerife, Spain, pp 155-157, 10-15 Mar 2002... 

Starodub NF, Starodub VM (2004) Biosensors based on the photoluminescence of porous silicon overall characteristics and apphcation for the medical diagnostics. Sensors Electronics and Microsystem Technol 2 63-83... 

Kim SJ, Jeon BH, Choi KS (1999) Improvement of the sensitivity by UV light in alcohol sensors using porous silicon layer. In CAS 99 Proceedings of the international semiconductor conference, Sinaia, Romania, 2 475 78... 

SorU B, Garcia M, Benhida A et al (1999) Porous silicon layer used as a humidity sensor. In Proceedings of the european matter conference E-MRS spring meeting. Symposium 1 micro-crystalline and nanocrystaUine semiconductors, 1-8... 

Schoening MJ, Ronkel E, Crott M et al (1997) Miniaturization of potentiometric sensors using porous silicon microtechnology. Electrochim Acta 42 3185-3193... 

Use of conventional reference electrodes is a limiting factor in reducing the size of the various CHEMFETs. This could be solved by incorporating the reference electrode into the CHEMFET chip. An example of this is the on-chip fabrication of an Ag/AgCl electrode containing a gel-filled cavity sealed with a porous silicon plug [84]. Unfortunately, sensor lifetime can be limited by leakage of the reference solution. 

Laurell T, Drott J, Rosengren L, Lindstrom K. Enhanced enzyme activity in silicon integrated enzyme reactors utilizing porous silicon as the coupling matrix. Sensors Actuators, B 1996 31 161-166. 

S. F. Chuang, S. D. Collins, and R. L. Smith, Preferred crystallographic directions of pore propagation in porous silicon layers. The Technical Digest of the Solid State Sensor and Actuator Workshop, Hilton Head Island, SC, June 6-9 (IEEE, New York), p. 151, 1988. 

Th. Bischoff, G. Muller, W. Welser, and F. Koch, Frontside micromachining using porous-silicon sacrificial-layer technologies. Sensors Actuators A 60, 228, 1997. 

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