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Capacitance porous silicon

Rittersma ZM, Splinter A, Bodecker A, Benecke W (2000) A novel surface-micromachined capacitive porous silicon humidity sensor. Sens Actuators B 68 210-217 Sim J-H, Cho C-S, Kim J-S, Lee J-H, Lee J-H (1998) Eight beam piezoresistive accelerometer fabricated by using a selective porous silicon etching method. Sens Actuators A 66 273-278 Steiner P, Lang W (1995) Micromachining applications of porous silicon. Thin Solid Films 255 52-58... [Pg.542]

Kim S-J, Jeon BH, Choi K-S, Min N-K (2000) Capacitive porous silicon sensors for measmement of low alcohol gas concentration at room temperature. Solid State Electrochem 4 363-366 Kitsara M, Goustouiidis D, Chatzandroulis S, Beltsios K, Raptis I (2006) A lithographic polymer process sequence for chemical sensing arrays. Microelectron Eng 83 1192-1196... [Pg.375]

Rittersma ZM, Splinter A, Bodecker A, Benecke W (2000) A novel surface-micromachined capacitive porous silicon humidity sensor. Sens Actuators B 68 210-217... [Pg.376]

Betty CA (2009) Highly sensitive capacitive immunosensor based on porous silicon-polyaniline sfructure bias dependence on specificity. Biosens Bioelectron 25 338... [Pg.443]

Capelle M, Billoue J, Poveda P, Gautier G (2012) RF performances of inductors integrated on localized p+ type porous silicon regions. Nanoscale Res Lett 7 523-529 Chong K, Xie Y (2005) Low capacitance and high isolation bond pas for high-frequency RFICs. IEEE Electr Dev Lett 26 746-748... [Pg.814]

Endres HE, Hartinger R, Schwaiger M, Gmelch G, Roth M (1999) A capacitive CO sensor system with suppression of the hunudity interference. Sens Actuators B 57(l-3) 83-87 Erdamar O, BUen B, Skarlatos Y, Aktas G, Ind MN (2007) Effects of humidity and acetone on the optical and electrical properties of porous silicon nanostructures. Physica Status Sohdi C 4 601-603 Fiiijes P, KovScs A, Diicso Cs, Adam M, Muller B, Mescheder U (2003) Porous sihcon-based humidity sensor with interdigital electrodes and internal heaters. Sens Actuators B 95 140-144 Goeders KM, Colton JS, Bottomley LA (2008) Microcantilevers sensing chemical interactions via mechanical motion. Chem Rev 108 522-542... [Pg.374]

Dey D, Munshi S (2008) An artificial neural network based system for measurement of humidity and temperature using capacitive humidity sensor and thermistor. Sens Transducers J 97(10) 1-10 Di Francia G, Noce MD, Ferrara VL, LanceUotti L, MorvUlo P, Quercia L (2002) Nanostractured porous silicon for gas sensor application. Mater Sci Technol 18 767-771... [Pg.405]

A distinctive feature of CCs based on titanium carbide as compared to CCs based on silicon carbide is a higher specific surface area under similar synthesis conditions. Figure 27.18 shows comparison of capacitance-voltage dependences (potentials are measured vs. a porous carbon electrode with high capacitance) for four CCs in a sulfuric acid solution for the range of maximum reversibility, that is, the range of EDL charging. [Pg.293]

Xu CN, Miyazaka K, Watanabe T (1998) Humidity sensors using manganese oxides. Sens Actuators B 46 87-96 Xu YY, Li XJ, He JT, Hai XH, Wang Y (2005) Capacitive humidity sensing properties of hydrothermtilly-etched silicon nano-porous pillar array. Sens Actuators B 105 219-222... [Pg.408]

See other pages where Capacitance porous silicon is mentioned: [Pg.656]    [Pg.656]    [Pg.266]    [Pg.132]    [Pg.541]    [Pg.648]    [Pg.808]    [Pg.316]    [Pg.245]    [Pg.370]    [Pg.400]    [Pg.1141]    [Pg.159]    [Pg.49]    [Pg.171]    [Pg.79]    [Pg.354]    [Pg.328]    [Pg.300]    [Pg.291]    [Pg.393]   
See also in sourсe #XX -- [ Pg.354 ]



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