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Porous silicon gas sensors

Abstract This chapter discusses the use of porous silicon (PSi) for gas sensors. It is of great importance to develop efficient and economically viable gas sensors for different applications. PSi can be nsed as an alternative material for gas sensors, operating at a relatively low temperature, including room temperatnre.The interest in this material is mainly due to its extremely high surface-to-volume ratio, the ease of its formation and its compatibility with modem silicon microelectronics fabrication technologies. A large variety of different sensors made of PSi have been manufactured in recent years, and achievements in this field are reported in this chapter. [Pg.408]

Key words porous silicon, gas sensor, photoluminescence quenching, noise. [Pg.408]

PSi can be used as an alternative material for gas sensors, as it requires a relatively low level of preheating in order to operate (up to room [Pg.408]

A large variety of different sensors made of PSi has been fabricated over recent years. The detection and quantification of bacterium, viruses and other organic materials, including DNA, measured by PSi sensors have been reported (Saha, 2008 Miller, 2012). The properties of gas sensors will be discussed below. [Pg.409]

The capacitance and the conductance of a porous layer depend on its porosity (i.e. the size and distribution of pores, which can vary from mesopores to micro- and nano-pores). Capacitance and conductance are also affected by controlling the etching current density, etching time, the concentration of the electrolyte, and the intensity and wavelength of the illumination (Baratto [Pg.409]

Acquaroli, L. N., Urteaga, R. and Koropecki R. R. Innovative design for optical porous silicon gas sensor , (2010) Sensor. Actuat. B. 149,189-93. [Pg.425]

Bjourkvist, M., Salonen, X,Tuura,T.JalkanenTero, and LehtoVesa-Pekka. Detecting amine vapours with thermally carbonized porous silicon gas sensor , (2009) Phys. Stat. Solidi C. 6,1769-72. [Pg.427]

Jalkanen, T.,Tuura, X, Makila, E. and Salonen, X Electro-optical porous silicon gas sensor with enhanced selectivity , (2010) Sensor. Actual. B. 147,100-4. [Pg.427]

Simons AJ, Cox TI, Uren MJ et al (1995) The electrical properties of porous silicon produced from n + silicon substrates. Thin Solid Films 255 12-15 Skryshevsky VA, Strikha VI, Mamikin AV et al (1998) Availability of current -voltage characteristics for porous silicon gas sensors, Discrete gas sensor. Paper presented at eorosensors XII13-16 Sept 277-280... [Pg.367]

Muller G, Friedberger A, Knese K (2010) Chapter 25 Porous silicon based MEMS. In Handbook of silicon based MEMS materials and technologies, William Andrew Publication, USA pp 409-431 Ozdemir S, Gole JL (2007) The potential of porous silicon gas sensors. Curr Opin Solid State Mater Sci ll(5-6) 92-100... [Pg.524]

Baiillaro G, Bruschi P, Pieri F, Strambini LM (2007) CMOS-compatible fabrication of porous silicon gas sensors and their readout electronics on the same chip. Phys Stat Sol (a) 204(5) 1423-1428... [Pg.539]

Fig. 1 Sketch of a multilayered optical device (on die left) and a FET-like electrical device (on the right) representative of the last-generation architecture of porous silicon gas sensors... Fig. 1 Sketch of a multilayered optical device (on die left) and a FET-like electrical device (on the right) representative of the last-generation architecture of porous silicon gas sensors...
Table 3 Sensed species with electrical and optical porous silicon gas sensor architectures of Tables 1 and 2 Substanees sensed with electrical and optical porous silicon gas sensors ... Table 3 Sensed species with electrical and optical porous silicon gas sensor architectures of Tables 1 and 2 Substanees sensed with electrical and optical porous silicon gas sensors ...
Chakane S, Gokama A, Bhoraskar SV (2003) Metallophthalocyanine coated porous silicon gas sensor selective to N02. Sens Actuator B 92 1-5... [Pg.653]

Jalkanen T, Tuura J, Makila E, Salonen J (2010) Electro-optical porous silicon gas sensor with enhanced selectivity. Sens Actuators B 147 100-104 Jelinek V, Vrkoslav T, Trojan J, Jindfich JD (2007) Host-guest interactions in gas phase chemical sensing of permethyl-6I-alkenoylamino-6I-deoxy-p-cyclodextrin derivatized porous silicon. Phys Stat Solidi C 4(6) 2083-2087... [Pg.654]

Ozdemir S, Gole JL (2007) The potential of porous silicon gas sensor. Curr Opin Solid State Mater Sci 11 92-100 (Review)... [Pg.656]

Ozdemir S, Gole JL (2010) A phosphine detection matrix using nanostructure modified porous silicon gas sensors. Sens Actuator B 151 274-280 Pancheri L, Oton CJ, Gaburro Z, Soncini G, Pavesi L (2003) Very sensitive porous silicon N02 sensor. Sens Actuator B 89 237-239... [Pg.656]

Seals L, Gole JL, Tse LA, Hesketh PJ (2002) Rapid, reversible, sensitive porous silicon gas sensor. JApplPhys 91 2519-2523... [Pg.657]

Lewis SE, De Boer JR, Gole JL, Hesketh PJ (2005) Sensitive, selective, and aneilytical improvements to a porous silicon gas sensor. Sens Actuators B 110 54-65... [Pg.318]

Levy-Clement C, Lagoubi A, Tomkiewicz M (1994) Morphology of porous n-type silicon obtained by photoelectro-chemical etching 1. Correlations with material and etching parameters. J Electrochem Soc 141 958-967 Lewis SE, DeBoer JR, Gole JL, Hesketh PJ (2005) Sensitive, selective, and analytical improvements to a porous silicon gas sensor. Sens Actuators B 110 54-65... [Pg.383]

Mahmoudi BE, Gabouze N, Haddadi M, Mahmoudi BR, Chetaga H, BeldjUali K, Dahmane D (2007a) The effect of annealing on the sensing properties of porous silicon gas sensor use of screen-printed contacts. Sens Actuators B 123 680-684... [Pg.383]

See other pages where Porous silicon gas sensors is mentioned: [Pg.408]    [Pg.409]    [Pg.411]    [Pg.413]    [Pg.415]    [Pg.417]    [Pg.419]    [Pg.421]    [Pg.423]    [Pg.425]    [Pg.427]    [Pg.429]    [Pg.209]    [Pg.229]    [Pg.229]    [Pg.538]    [Pg.647]    [Pg.647]    [Pg.651]    [Pg.653]    [Pg.654]    [Pg.655]    [Pg.656]    [Pg.318]   


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