Organometallic Chemical Vapor Deposition MOCVD

Laser-assisted chemical vapor deposition a CVD in which the excitation is delivered from photons delivered from a laser Metal-organic chemical vapor deposition (MOCVD) the same as CVD, except that the precursor is a volatile organometallic or coordination compound with carbon-containing ligands... [Pg.2629]

Organometallic chemical vapor deposition the same as MOCVD... [Pg.2629]

A method that overcomes some of these limitations is metal-organic chemical vapor deposition (MOCVD), sometimes called organometallic vapor phase epitaxy (OMVPE) °. An organometallic compound such as a group IIB alkyl reacts with a chalcogenide hydride on a substrate that is at the highest temperature in the chamber ... [Pg.401]

Chemical beam epitaxy a process in which one or more beams of volatile metal-organic precursors is directed to the substrate surface to effect film growth Chemical vapor deposition (CVD also termed vapor phase epitaxy) the deposition of a thin film of an element or compound using some form of excitation for the decomposition of a volatile precursor Laser-assisted chemical vapor deposition a CVD in which the excitation is delivered from photons delivered from a laser Metal-organic chemical vapor deposition (MOCVD) the same as CVD, except that the precursor is a volatile organometallic or coordination compound with carbon-containing ligands... [Pg.2628]

Organometallic (Metallorganic) Chemical Vapor Deposition (MOCVD)... [Pg.356]

MOCVD (metal-organic chemical vapor deposition), OMVPE (organometallic vapor-phase epitaxy), and HVPE (hydride vapor-phase epitaxy) have some... [Pg.239]