Optical microscopy, analytical method Applications

The most frequently applied analytical methods used for characterizing bulk and layered systems (wafers and layers for microelectronics see the example in the schematic on the right-hand side) are summarized in Figure 9.4. Besides mass spectrometric techniques there are a multitude of alternative powerful analytical techniques for characterizing such multi-layered systems. The analytical methods used for determining trace and ultratrace elements in, for example, high purity materials for microelectronic applications include AAS (atomic absorption spectrometry), XRF (X-ray fluorescence analysis), ICP-OES (optical emission spectroscopy with inductively coupled plasma), NAA (neutron activation analysis) and others. For the characterization of layered systems or for the determination of surface contamination, XPS (X-ray photon electron spectroscopy), SEM-EDX (secondary electron microscopy combined with energy disperse X-ray analysis) and... 

For chemical sensing apphcations, viruses represent a type of species that is of special interest because their size normally is in the range between 10 and some lOOnm. Therefore, they are too small to be visualised by optical microscopy, which means that currently there are no fast, easy-to-use techniques for their detection. Additionally, as viruses may be a substantial threat to humans, livestock or plants, a direct on-line method for their determination would be highly desirable. The imprinting approach promises to solve these problems, because, as already mentioned, it is inherently applicable to a very wide variety of analytes and not restricted to a certain size or to defined chemical properties of the material or the template. 

Depth concentration measurement is an important application of surface analytical methods. Examples are depth distribution of additives in plastics, or interface analysis where polymers are in contact with metals or ceramics. All surface methods with a good depth resolution (XPS, AES, SIMS) are suitable for depth or profile measurements. Complete multilayer coating systems require analytical methods that are applicable to small sample sizes and low concentrations. Techniques for obtaining chemical composition and component distribution depth profiles for automotive coating systems, both in-plane (or slab) microtomy and cross-section microtomy, include /xETIR, /xRS, ToE-SIMS, optical microscopy, TEM, as well as solvent extraction followed by HPLC, as illustrated by Adamsons et al. [5]. Surface and interface/interphase analysis can now be done routinely on both simple monolayer coatings and complex multicomponent, multilayered... 

The non-isothermal crystallisation of PETP was examined by temp, modulated DSC(TMDSC). A new analytical model of TMDSC was applied to the process, taking account of the response of exothermic heat flow to temp, modulation in an apparent heat capacity of complex quantity. By examining the frequency dependence of the apparent heat capacity, the applicability was successfully examined for the non-isothermal process. The method was capable of determining the temp, dependence of crystal growth rate from TMDSC data analysis. The results were in good agreement with the dependence determined from literature values of spherulite growth rate measured by optical microscopy. 12 refs. 

Probably the most extensive use of particle morphology and microscopy has been in the area of chemical microscopy. With this approach, derivatives of the analyte species are prepared, crystallized, and identified through the morphological characteristics of these derivatives [21]. Most of these applications have been superseded by modem methods of analysis, but the microscopic method can still be used by skilled practitioners for the study of trace quantities of analyte. The literature developed during the heyday of chemical microscopy is too large to be reviewed here, but advances in the field are still chronicled in the Annual Reviews issue of Analytical Chemistry [22]. A substantial review of the optical characteristics of organic compounds is available [23]. 

With respect to other major literature on or related to XRE, are chapters in various analytical series and individual books. Two chapters are in the first edition of the famous Treatise on Analytical Chemistry. Comprehensive coverage of X-ray methods absorption, diffraction, and emission is provided by Liebhafsky et al. (1964) in a 90-page chapter in the section on Optical methods of analysis (E. J. Meehan, section advisor). This is immediately followed by the chapter by Wittry (1964) on X-ray microanalysis by means of electron probes. Chapters on relevant topics appearing in the other well known series on analytical chemistry. Comprehensive Analytical Chemistry, are by Beretka (1975) (Analytical applications of electron microscopy) with a brief mention of the XRF-based technique electron probe... 

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