Micro electro mechanical system MEMS

Ho C-M, Tai Y-C (1998) Micro-electro-mechanical systems (MEMS) and fluid flows. Ann Rev Fluid Mech 30 579-612... 

Yao, S.C., Tang, X., Hsieh, C.C., Alyousef, Y, Vladimer, M., Redder, G.K., Amon, C.H., 2006. Micro-electro-mechanical systems (MEMS)-based micro-scale direct methanol fuel cell development. Energy 31 636-649. 

Until now, all in the literature proposed LAPS devices are complete autarkic measurement systems. Further applications can be found by the integration of LAPS devices into existing analytic fields. This requires the development of inexpensive integrated electronic units to operate the LAPS and to provide a standardised communication with higher process levels. The LAPS devices need to be easy in use to allow the operation in commercial environments. Due to the simple structure of the LAPS, the integration into micro-electro-mechanical systems (MEMS), lab-on-chip and micro-total analysis systems (p-TAS) might be of special interest in the near future. 

X.Q. Wang, Y.C. Tai, Normally closed in-channel micro check valve, Proceedings of the 13th IEEE International conference on micro electro mechanical systems (MEMS 2000), Miyazaki, Japan, 68 (2000). 

Micro Electro Mechanical Systems (MEMS 2001), Interlaken, Switzerland, 539... 

J. Xie, J. Shih, Y. Miao, T.D. Lee, Y.-C. Tai, Complete gradient-LC- ESI system on a chip for protein analysis. Proceedings of the 18th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2005). Miami Beach, Florida, Jan 30-Feb 2, 778 (2005). 

Micro flow control devices open new possibilities for the miniaturization of conventional chemical and biochemical analysis systems. The micro total analysis system (pTAS) including microfabricated detectors (e.g. silicon based chemical sensors, optical sensors), micro flow control devices and control/detec-tion circuits is a practical micro electro mechanical system (MEMS). pTAS realize very small necessary sample volume, fast response and the reduction of reagents which is very useful in chemical and medical analysis. Two approaches of monolithic and hybrid integration of these devices have been studied. Monolithic and hybrid types of flow injection analysis (FIA) systems were already demonstrated [4, 5]. The combination of the partly integrated components and discrete components is useful in many cases [6]. To fabricate such systems, bonding and assembling methods play very important roles [7]. 

The application of actuators in micro-electro-mechanical systems (MEMS) requires the miniaturization (100 to 500 microns) of the permanent-magnet components while preserving as much as possible their bulk magnetic properties. In many instances, a severe degradation in coercivity occurs when the magnet size is reduced at such small dimensions. This is par-... 

Spin coated copolymer films show a decrease in remanent polarisation if the film thickness [504, 505] decreases. The application of piezoelectric materials in micro-electro-mechanical systems (MEMS) or sensors makes it often necessary to decrease the lateral dimensions of the elements. Recently, Alexe et al. [506, 507] fabricated freestanding microcells with lateral dimensions down to 100 nm and heights of 110 nm from a ferroelectric PZT by direct... 

Shih, J.C., Ho, C., Liu, J. and Tai, Y., Monatomic and Polyatomic Gas Flow Through Uniform Microchannels, Micro Electro Mechanical Systems (MEMS), National Heat Transfer Conference, DSC 59, 1996, 197-203. 

Since HOD films have flat surfaces much smoother than ordinary polycrystalline diamond films, it is expected that HOD films will be used for electronic sensors and devices as well as micro electro-mechanical systems (MEMS) in the future. To this end, a selective deposition of (lOO)-oriented HOD films was undertaken using the two-step process on a 2-inch Si(lOO) wafer, and a 0.5-pm thick Si02 film was used for a masking film [295]. It was demonstrated that a micropattern of 6-pm thick HOD films was possible, and even a 8-pm wide channel was also formed. Selective deposition using polycrystalline films has been studied before [359], but this work demonstrated that a similar fabrication is possible using HOD films. 

Biomedical Microdevices—BioMEMS and Biomedical Nanotechnology. The Netherlands Kluwer Academic Publishers. ISSN 1387-2176. Interdisciplinary periodical devoted to all aspects of research in the diagnostic and therapeutic applications of micro-electro-mechanical systems (MEMS), microfabrication, and nanotechnology. Contributions on fundamental and applied investigations of the material science, biochemistry, and physics of biomedical microdevices are encouraged. 

In the last couple of decades, both Micro-electro-mechanical systems (MEMS) and microbiology achieved remarkable progress. MEMS provide very small systems, made of very small electrical and mechanical components. These systems range in size from sub micrometer level to millimeter level, and can include any component number, from a few to millions, in a particular system. MEMS extend the fabrication... 

K. Funk, H. Emmerich, A. Schilp, M. Offenberg, R. Neul, and F. Larmer, in Proc. 12th IEEE Int. Conf. Micro Electro Mechanical Systems (MEMS 99), Orlando, FL, 1999, pp. 57-60. 

F. Lacharme, C. Vandevyver, and M.A.M. Gijs Magnetic bead retention device for full on-chip sandwich immuno-assay. in 21st IEEE International Conference on Micro Electro Mechanical Systems MEMS 2008, 184-187 (2008) Tucson, AZ, USA. 

M. Shikida, K. Inouchi, H. Honda, and K. Sato Magnetic handling of droplet in micro chemical analysis system utilizing surface tension and wettability, in 17th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2004), 359-362 (2004) Maastricht, The Netherlands. 

Recently Micro Electro-Mechanical Systems (MEMS) have been emerging as sensor platform for the development of sensors with extreme high sensitivity [8-14]. Micromachined silicon cantilevers are the simplest MEMS sensors that can be micromachined and mass-produced. Microcantilever sensor technology is an upcoming sensing technique with broad applications in chemical, physical, and biological detection. With their compactness and potential low cost, detection techniques based on silicon-based cantilevers provide a path for the development of miniaturized sensors. 

Ikuta and K. Hirowatari, Real three dimensional micro fabrication using stereohthography, in Proc. IEEE Micro Electro Mechanical Systems (MEMS 93), Ft. Lauderdale, pp. 42 47 (1993) K. Ikuta, K. Hirowatari, and T. Ogata, Three dimensional integrated fluid systems (MIPS) fabricated by stereo lithography, in IEEE Int. Workshop on Micro Electro Mechanical Systems (MEMS 94), Oiso, Japan, pp. 1 6 (1994). 

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