Micro-opto-electro-mechanical systems

Based on the micro-electronics fabrication process, Micro-Opto-Electro-Mechanical Systems (MOEMS) have not yet been used in astronomical instrumentation, but this technology will provide the key to small, low-cost, light, and scientifically efficient instruments, and allow impressive breakthroughs in tomorrow s observational astronomy. Two major applications of MOEMS are foreseen ... 

Micro-Opto-Electro-Mechanical Systems (MOEMS) will be widely integrated in new astronomical instruments for future Extremely Large Telescopes, as well as for existing lOm-class telescopes. The two major applications are programmable slit masks for Multi-Object Spectroscopy (see Ch. 12) and deformable mirrors for Adaptive Optics systems. Eirst prototypes have shown their capabilities. However, big efforts have stiU to be done in order to reach the requirements and to realize reliable devices. 

Amritsar, J., Stiharu, I., Packirisamy, M. Bioenzymatic detection of troponin C using micro-opto-electro-mechanical systems, J. Biomed. Optics, 11(2), 21010-1-7... 

Novel developments using micro-opto-electro-mechanical systems as moving mirrors in the interferometers (Kenda et al., 2011) bridge the gap between classical FTIR setups and microsystems. They target the miniaturization of the spectrometers. 

Hybrid integration of light emitters and detectors with SOI-based micro-opto-electro-mechanical (MOEMS) systems, Proc. SPIE 4293, Silicon-Based and Hybrid Optoelectronics III, D.J. Robbins, J.A. Trezza, G.E. Jabbour, Eds., pp. 32-45 (2001). 

D. Maas, J. Fahrenberg, W. Keller, D. Mihalj, D. Seidel, in Microsystem Technologies 1994, 4th International Conference on Micro, Electro, Opto, Mechanical Systems and Components, Berlin, ed. by H. Reichl (VDE-Verlag, 1994)... 

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