Manufacturing processes chamber

The benefit of such a LAPS sandwich structure consists in a easy manufacturing process, where no patterning and masking as well as encapsulation of conducting tracks are needed (see Fig. 5.1). In the measurement set-up, the LAPS structure itself will be embedded in a measurement chamber. The flat uniform surface of the LAPS assists a proper sealing by, e.g., an O-ring, silicone or rubber material. Finally, only the sensitive membrane will stay directly in contact with the analyte under test. 

The heater for the reaction chamber and the conductors were printed on the lowest layer and electrically contacted to the pads on the cover layer by vertical metal-filled vias in every intermediate layer. Still some manual work was necessary to shape the reaction channel from the pre-fired tapes. Also the soldering of clamp-type fittings to the cover layer is certainly difficult to automate. However, a manufacturing process for ceramic foil reactors seems to be within reach. 

Both films with organic FETs and photodiodes are transferred to the vacuum chamber without exposure to air after the manufacturing process and uniformly coated with a 2 pm poly(monochloro-para-xylylene) (parylene) passivation layer. Spots of parylene on electrodes are removed by a CO2-laser drilling machine for... 

Injection Molding Plastic resin, in the form of pellets, is fed into a high temperature chamber where the resin is heated to the point that it becomes a fluid. This fluid is then fed into a mold. As it cools, the plastic takes the form of the mold to create a final shape. This is considered to be a relatively unsophisticated manufacturing process useful for such items as plastic toys and household items. 

Because pure steam is corrosive, Serail manufactures the chamber, condenser, shelves, coils, and all process piping in 316 L stainless steel. The system is designed to reduce the time of sterilization by fast cooling and inside dry vacuum of the trap and the chamber. The sterilization will take 5H2O. 

There are some special cases for which it is unnecessary to add a lubricant. Magnetic bearings and bearings that are suspended by a pressurized gas have no metal-to-metal contact so that wear and heat buildup are avoided. Several companies sell oil-free vacuum pumps that eliminate the trouble and expense of changing the oil, disposal costs, and contamination of process chambers, which is especially important in the manufacture of semiconductors and liquid crystal crystal displays.40 Plastic gears of nylon or polytetrafluoroethylene are self-lubricating and need no added lubricant. They reduce the noise associated with ma-... 

Fig. 6.7-45 Diagram of the manufacturing process of (hollow) building blocks made from lime and sand. 1, lime ball mill 2, elevator 3, wind sifter 4, 9, 11, silos 5, metering bucket 6, screw conveyor 7, sand feed 8, screen 10, batch mixing and hydration drum 12, proportioning 13, elevator 14, stone press 15, block cart 16, transfer platform 17, post-treatment (hardening) chambers 18, steam production Fig. 6.7-46 Sketch of a manual pusher furnace [B.28, B.97j...

The in situ plasma cleaning procedure performed after CVD of dielectric thin films is one of the major emitters of PFCs in semiconductor manufacturing it can represent 50-70% of the total PFC emission in a semiconductor fabrication plant. To clean the process chambers of deposited by-products, conventional cleaning methods use CF4 or C2F6 gases activated by RF CCP (usually 13.56 MHz) inside the process chamber. These PFC gases achieve a relatively low degree of dissociation and unreacted molecules are enutted in the process... 

A patented feature of the Granurex is its ability to dry product within the same processing chamber. This unique drying method, combined with 12 bar construction, provides a true one-pot system, ideal for manufacturing highly potent and expensive pharmaceutical compounds. 

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