SEARCH Articles Figures Tables Alicyclic polymer resist system deprotection kinetics Catalytic kinetics controlling resistance Deprotection kinetics of alicyclic polymer resist systems designed for Deprotection kinetics of representative resist polymer systems Electrode kinetics resistance, electrolyte Electrode kinetics transfer resistance General Reaction Kinetics Diffusion Resistance as the Rate-Determining Step Heat-transfer resistances, chemical kinetics Kinetic models mass transfer resistance Kinetic resistivity Kinetic resistivity apparatus Pore Diffusion Resistance Combined with Surface Kinetics Resist development kinetic effects Resistance kinetics modeling