Resist development kinetic effects

When charge-transfer kinetics manifest themselves in a chemically reversible n-electron system, they do so in the manner discussed in relation to Figure 10.3.3. The kinetic effects can be expressed in terms of a charge-transfer resistance R t defined operationally as in (10.2.8). Further analysis of R t, such as to obtain the rate constant of the RDS, requires knowledge of the i-E characteristic for the mechanism, which can, however, be difficult to develop (see Section 3.5.4). 

The performance indexes, which define an optimal catalyst distribution, include effectiveness, selectivity, yield and deactivation rate. The key parameters, affecting the choice of the optimal catalyst profile, are the reaction kinetics, the transport resistances, and the production cost of the catalyst. An extensive review of the theoretical and experimental developments in this area is available [20]. Two typical examples to demonstrate the importance of an appropriate distribution of the active components are now described. 

---