Inductively couple plasma schematic

Figure 2.4. Schematic of an inductively coupled plasma (ICP) ion source.

If high enough temperatures can be reached, any element can be excited to a level where it will produce emission of radiation. Such high temperatures can be achieved by using plasma emission. A schematic diagram of an inductively coupled plasma (ICP) torch is shown in Figure 6.6. 

Figure 5.22 Schematic of laser ablation inductively coupled plasma mass spectrometer a laser ablation system (wa velength 213 nm) is coupled to a double-focusing sector field ICP-MS (Element, Thermo Fisher Scientific, Bremen). The cooled laser ablation chamber using two Peltier elements was developed in the author s laboratoryJ26 (M. V. Zoriy, M. Kayser, A. Izmer, C. Pickhardt and J. S. Becker, Int. J. Mass Spectrom., 242, 297 (2005). Reproduced by permission of Elsevier.)...

The most frequently applied analytical methods used for characterizing bulk and layered systems (wafers and layers for microelectronics see the example in the schematic on the right-hand side) are summarized in Figure 9.4. Besides mass spectrometric techniques there are a multitude of alternative powerful analytical techniques for characterizing such multi-layered systems. The analytical methods used for determining trace and ultratrace elements in, for example, high purity materials for microelectronic applications include AAS (atomic absorption spectrometry), XRF (X-ray fluorescence analysis), ICP-OES (optical emission spectroscopy with inductively coupled plasma), NAA (neutron activation analysis) and others. For the characterization of layered systems or for the determination of surface contamination, XPS (X-ray photon electron spectroscopy), SEM-EDX (secondary electron microscopy combined with energy disperse X-ray analysis) and... 

Color Plate 23 Polychromator for Inductively Coupled Plasma Atomic Emission Spectrometer with One Detector for Each Element (Section 21-4) Light emitted by a sample in the plasma enters the polychromator at the right and is dispersed into its component wavelengths by grating at the bottom of the diagram. Each different emission wavelength (shown schematically by colored lines) is diffracted at a different angle and directed to a different photomultiplier detector on the focal curve. Each detector sees only one preselected element, and all elements are measured simultaneously. [Courtesy TJA Solutions, Franklin, MA.J... 

Figure 4 Schematic diagram of high-pressure liquid chromatography inductively coupled plasma mass spectrometry (HPLC-ICP-MS) system with dual-inlet system for isotope dilution analyses. (From Ref. 32.)...

Figure 23 Schematic representation of inductively coupled plasma Fourier transform ion cyclotron resonance (ICP-FT-ICR) mass spectrometer used to obtain spectra shown in Figs. 9.21 and 9.22.

Figure 1 Schematic diagram of a typical commercial inductively coupled plasma mass spectrometry (ICP-MS) instrument (A) liquid sample, (B) peristaltic pump, (C) nebulizer, (D) spray chamber, (E) argon gas inlets, (F) load coil, (G) sampler cone, (H) skimmer cone, (I) ion lenses, (J) quadrupole, (K) electron multiplier detector, (L) computer.

Schematic diagram of an inductively coupled plasma source.

Fig. 10. Schematic view of the Inductively-Coupled Plasma (ICP) Selected-Ion Flow Tube (SIFT) tandem mass spectrometer. The ICP torch produces metal ions M+ that are mass-selected and injected into the flow tube. The M+ ions may be ligated with molecules L before they enter the reaction region further downstream...

An additional effusive beam source, operated with pure O2 as the precursor geis, is used for some studies. This source, shown schematically in Fig. 7, is a low pressure ( 100 mTorr) RF discharge tube, with a small hole (0.5 mm) in the end. The inductively coupled plasma is typically operated at a power of 50 W. The effluent (beam) from this source has been characterized by aligning the detector with the plasma source and placing... 

Figure 3. Schematic of the inductively coupled plasma—polychromator...

Figure 11.15 Schematic diagram of an inductively coupled plasma located within its torch, as employed in atomic emission spectroscopy. From Dean, J. R., Atomic Absorption and Plasma Spectroscopy, ACOL Series, 2nd Edn, Wiley, Chichester, UK, 1997. Reproduced with permission of the University of Greenwich.

Figure 11.6. Schematic representation of an inductively coupled plasma discharge. Adapted from V. A. Fassel and R. N. Kniseley, Anal. Chem., 46, lllOA (1974), by permission of the publisher. Copyright 1974 by the American Chemical Society. 

FIGURE 52.2 Schematic drawing of both reactive ion etching (RIE) and inductively coupled plasma (ICP) etching systems. In both cases, RF radiation is used to induce a plasma that is subsequently driven to the surface as a result of the charges on the gases coupled to a potential bias on an electrode underneath the substrate. 

Figure 6 Schematic diagram of online coupling LC-ICP-MS via conventional nebulization and via microwave (MW)-HG. (Reprinted from Gonzalez LaFuente JM, Marchante Gayon JM, Fernandez Sanchez ML, and Sanz-Medel A (1999) Urinary selenium speciation by high-performance liquid chromatography-inductively coupled plasma mass spectrometry advantages of detection with a double focussing mass analyser with a hydride generation interface. Talanta 50 207-217.)...

Schematic diagram of a commercial inductively coupled plasma-mass spectrometer. (From Kellner, R., Mermet, J.-M., Otto, M., Valcarcel, M., and Widmer, H.M., Analytical Chemistry A Modem Approach to Analytical Science, 2nd edn., Wiley-VCH Verlag GmbH Co. KGaA, Weinheim, Germany, 2004,118Z)...

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