Hybrid clean process

Figure 17.25 Hybrid clean process for overall defect reduction.

An example of post-CMP clean process sequence design for defect reduction is the hybrid clean process as illustrated in Figure 17.25. In this approach, an acidic chemical is used in the roller bmsh steps in sequence to dissolve the metal oxide PR/FM while an alkaline clean chemical is plumbed to the megasonic tank without power to clean off the remaining PR/FM and passivate the Cu surface. In other words, the megasonic clean station is adopted only as a rinse tank with an alkaline chemical solution. The use of acidic clean chemical solution in the bmshes to dissolve metal oxide is the key to the reduction of PR/FM and the ehmination of circular ring defects. The application of a basic chemical rinse step provides further reduction in surface defects and passivation of the Cu surface to prevent the formation of HM and DE defects. 

N. Lustig, C. Bunke, C. Traong, M. Chudzik, S. Grunow, Post copper CMP hybrid clean process for advanced BEOL technology, IEEE Trans. Semicond. Manuf. 26 (4) (2013) 493-499. 

An effluent stream of 3 m /h containing 7.6 gd of sodium sulfate at 20 C is treated in a hybrid process reverse osmosis for concentration and production of clean process water and membrane electrolysis for the conversion of sodium sulfate into sulfuric acid (15%) and caustic soda which is used for neutralisation. 

In the Part 1 of this volume, many topics such as, trends in polymeric gas separation membranes, trends in polymer/organoclay nanocomposites, S5uithesis of the hybrid metal-polymer nanocomposite, oxidation of pol5 ropylene-graphite nanocomposites, and investigation on the cleaning process of gas emissions are discussed. In Part 2, several case studies and reviews in biochemical sciences are reported. 

Table 4 summarizes the efficiency of membrane filtration as preliminary treatment in the hybrid process to obtain regenerated water for industrial reuse. Working with the adequate cleaning cycle to avoid fouling and to keep a constant flux (10 1 min ) important reduction in suspended solids (90%) and turbidity (60%) of the wastewaters is achieved but there is no significant reduction of other chemical or physical parameters, e.g., conductivity, alkalinity or TDS, or inactivation of E. coli. 

In addition to this, solid acid catalysts can also be used in the hydroisomerization cracking of heavy paraffins, or as co-catalysts in Fischer-Tropsch processes. In the first case, it could also be possible to transform inexpensive refinery cuts with a low octane number (heavy paraffins, n-Cg 20) to fuel-grade gasoline (C4-C7) using bifunctional metal/acid catalysts. In the last case, by combining zeolites with platinum-promoted tungstate modified zirconia, hybrid catalysts provide a promising way to obtain clean synthetic liquid fuels from coal or natural gas. 

Water supplied to industry has to meet stringent specifications. For example, process water for the chemical and biotechnology industries is routinely purified beyond potable water standards. Boiler feed water for steam generation must contain a minimum of silica. Reverse osmosis units designed specifically for these purposes are in widespread use today. For example, reverse osmosis/distillation hybrid systems have been designed to separate organic liquids. For semiconductor manufacture, reverse osmosis is combined with ultrafiltration, ion exchange, and activated carbon adsorption to produce the extremely clean water required. 

Guile, A.E., Juttner, B., Basic Erosion Process of Oxidized and Clean Metal Cathodes by Electric Arcs, IEEE Trans. Components, Hybrids, Manuf. Technol., PS-8, pp. 259-269, 1980. 

It can be concluded that there is a potential for membrane separation of almost any gas from a mixture of gases if physical and chemical properties are carefully considered as well as material properties and durability, possible transport mechanisms, and optimum process conditions evaluated. Creative reflection and advanced research will be able to develop this environmental friendly separation technique for applications within many areas in the future, and hopefully be able to displace old, energyconsuming (and not so clean) technology or combine with them in hybrid process solutions. The costs of the final solution will always be a major issue for commercialization. 

The active groups on the slide surface should be deactivated during the post array processing. However, a prehybridization of bulk DNA to the slide can ensure a clean background (use general blocking reagents as mentioned below for the hybridization step). This prehybridization should take place immediately prior to hybridization and is based on standard hybridization protocols. 

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