Bulk Micro machining

For an electrostatically activated micromembrane pump fabricated by bulk micro-machining transient measurements of the pump chamber pressure and the inlet and outlet pressures were made. From these values also the time dependent flow rate can be deduced. A complex dynamic behaviour can be observed, with a low frequency oscillation of the maximum pressure. Measurements can be compared and predicted with the results of an simulation tool PUSI for micropumps connected to a peripheral fluid system. 

Bulk and surface micro machining constitute the main 3D-semiconductor processes. Wet etchants such as KOH, EDP or TMAH or alternatively, a dry etching... 

Kanda, T., Makino, A., Suzumori, L., Morita, T. and Kurosawa, M.K. (2004) A cylindrical micro ultrasonic motor using a micro-machined bulk piezoelectric transducer , in IEEE Ultrasonics Symposium, Montreal, Canada 1298-1301. 

The anisotropic wet etching of silicon is a unique fabrication process in the MEMS field. The need to develop new processes to fabricate functional 3D microstructures in various materials is urgent for progress in microfluidic systems, micro-sensors, micro-actuators and micro-instrumentation. At present, to integrate surface micro-machined devices and standard IC devices with bulk micromachined structures to demonstrate a new functional... 

On the other hand, a thinner lubricant layer range finm sub-nanometre to sub-micrometer will be needed if the machine coirqronents become even smaller, and micro machining more common. In thirmer soft metaUic lubricant l ers, it is anticipated that the material properties of ultra-thin films differ from those of bulk properties, i.e., the nano size effect might affect the ffictional performance. For example, the coefficient of fiiction, durability of the film and influence of the atmosphere might be different from those of a thicker lubricant layer. However, studies concerning such thin solid lubricant layers are very few. 

Micro-reaction chambers for the thermal cycling of DNA amphfication by the polymerase chain reaction (PCR) in silicon by bulk machining using anisotropic wet etching have been fabricated by Moore and co-workers [40]. The rapid temperature cycling and the small size of the chambers may be combined with an appropriate transducer in a miniaturized analytical system. 

---