Actuator fabrication

Fig. 86. (a) A side view of the cantilever actuator fabricated by combining TbFe and SmFe films. After Honda ei al. (1994). (b) Two-leg linear magnetostrictive micromotor. After Honda et al. (1994). 

Fig. 19. Structure of the micropump using thermopneumatic actuator fabricated on a silicon wafer [2]...

For early actuators fabricated in our lab with composite dielectrics of... 

Rosset S, NMaus M, Dubois P, Shea HR (2008) Performance characterization of miniaturized dielectric elastomer actuators fabricated using metal ion implantation. IEEE MEMS 2008, Tucson, AZ, USA, 13-17 Jan 2008, p 503... 

Apart from polyaniline, other condncting polymers that are being studied for electrolytic expansion include polypyrrole [11, 15-17], poly(alkylthiophene) [26] and carbon nanotubes [5]. For example, electrochemically prepared polypyrrole films were used to study the qualitative movement of electrolytic expansion by fabricating a bimorph actuator. The movement of bending and stretching of the actuator was demonstrated in electrolyte solution [15]. Actuators fabricated by electrodeposition on gold-coated polyethylene films were studied [11] for the evaluation of expansion ratio and response time. Also, a microactuator of several tens of microns made from two layers of gold and... 

FIGURE 2.27 SEM image of yam-in-fiber electrochemical linear actuator fabricated by threading eight polyaniline yarns into a polyaniline hollow counterelectrode with a porous polyacrylonitrile separator inserted between the two electrodes containing the ionic liquid electrolyte. 

Folded origami shapes, micro/nanorods, and bundled films have all displayed promising qualities for artificial muscles [108-110]. Origami actuators fabricated from folded PPy films have shown large strains at lower voltages and can be manipulated into a variety of shapes [110]. Nanotubular stmcture of conductive polymers is one of the ideal structures that can enhance device performance by improving... 

Okuzaki, H. Saido, T. Suzuki, H. Kara, Y. Yan, H. A biomorphic origami actuator fabricated by folding a conducting paper. J. Phys. Conf. Sen 2008,127, 012001. 

Actuators Fabrics able to actuate or move some aspect of their environment, such as electroactive and auxetic fabrics. 

Mineta, T., Mitsui, T., Watanabe, Y., Kobayashi, S., Haga, Y., Esashi, M. An active guide wire with shape memory alloy bending actuator fabricated by room temperature process. Sensors and Actuators A 97-98, 632-637 (2002)... 

Described in this chapter, are the basic aspects of IPMC actuator fabrications, measurement methods for testing, acmator performances, physics-based models and recent development of the material of the IPMC-like ionic polymer based acmators, based on our previous works. Interested readers can refer more comprehensive review articles on the IPMCs [6-9]. 

Fang, B.K., Ju, M.S., Lin, C.K. (2007) A new approach to develop ionic polymer-metal composites (IPMC) actuator Fabrication and control for active catheter systems. Sensors and Actuators A Physical, 137, 321-9. 

Another consideration is the small size of the objects that it is wished to move or manipulate, for which miniaturization of conventional actuators is not going to be possible. For instance, insect-size robots that can fly, hop and crawl are one example of systems that cannot be built with conventional actuators. Fabrication paradigms and driving principles prevent conventional drives from being scaled down further. 

In this article we refer to an actuator as closed when the associated chamber or channel volume is minimized, and as open when that volume is maximized. The volume in the closed position is called the dead volume, and the difference between the volume in the open position and the dead volume is the stroke volume. The stroke volume divided hy the dead volume is the compression ratio. Compression ratio is particularly important when purrping gases, since the amount of gas ejected from the actuator is reduced hy the compressihility of the fluid. In pure liquids this effect is much less, hut compression ratio plays an important role in determining how severely bubbles impact a particular purrp. In classifying micro-pumps, a distinction is sometimes made between integrated actuators - fabricated along with the other components of the microfluidic system - and external actuators - fabricated separately and attached later. It is common to see peristaltic micropumps of either kind. 

Kawachi M., Yasu M. Edahiro T. Fabrication of Si02-Ti02 glass planer optical wagveguides by flame hydrolysis deposition. Electron. Lett. 1983 19 583-584 Moilanen H., Lappalainen J., Leppavuori S. Development of piezoelectric micromovement actuator fabrication using a thick film double-paste printing method. Sensors Actuators A 1994 43 357-365... 

All DEs used in the experiments described in Sect. 3 of this chapter are multilayer stack actuators fabricated according to Schlaak et al. (2005) and Lotz et al. (2011) and consist of dielectric layers spin coated from the PDMS Wacker P7670 and graphite powder electrodes. 

Figure 3.5 X-beam parallel plate actuator fabricated in the PolyMUMPS process.

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