A Polishing Example

FIGURE 6.4 (a) Measured (open circles) and modeled (solid circles) removal rates and COF from a copper polishing experiment, (b) Mean 

Given E, the above compact model is applied to data by varying the four remaining parameters A, Cp, jS, and e to minimize the RMS error between the 

TABLE 6.1 Optimal Parameters for the Copper Data in Fig. 6.4a with E = 0.65 eV. 

---

When the adsorption capacity of a carbon unit is exceeded, there is breakthrough of the contaminant in the treated stream. Eixed beds may be operated in series to allow continuous treatment while spent or exhausted units are replaced with fresh carbon. In series operation, there are two or more units. The majority of the contaminant is removed by the first unit in the series with the downstream units acting as polishing units. When breakthrough occurs in the first or primary unit, it is replaced with fresh carbon and becomes a polishing unit while the next unit in the series takes over and becomes the primary treatment unit. An example of this round-robin operation of a three-carbon bed is shown in Eigure 2. 

Figure 3 Example of the BRDF characteristic of a polished optical surface. Note the rapid increase in scattering at small scatter angles.

An example of a Maugis-Pollock system is polystyrene particles having radii between about 1 and 6 p.m on a polished silicon substrate, as studied by Rimai et al. [64]. As shown in Fig. 4, the contact radius was found to vary as the square root of the particle radius. Similar results were reported for crosslinked polystyrene spheres on Si02/silicon substrates [65] and micrometer-size glass particles on silicon substrates [66]. 

The characteristics of a polished surface are that it should be level on a macroscopic scale related, for example, to machine and grinding marks of 1-5 /im depth, and be smooth and bright on a microscopic scale typically 1-100 nm size for fine grained metal. To achieve dual levelling and smoothing a solution must satisfy three requirements by including three types of constituent ... 

As shown in Fig. 1.117, Se-type and Te-type epithermal Au-Ag vein-type deposits are located in the Cretaceous-Quaternary volcanic terrane of Japan (e.g., northeast and southwest Hokkaido, middle Honshu, south Kyushu). Some Te-type deposits are located in regions similar to the Se-type deposits. Sometimes, Te mineralization is associated with the Se-type deposits, though Te minerals usually do not coexist with Se minerals. However, rarely, Te minerals coexist with Se minerals in the Te-type deposits (e.g., Teine, Suzaki, Kawazu, Iriki) on a polished section scale. For example, coexistence of native Te and Se-bearing tetrahedrite is found at Teine. Generally, Te mineralization occurs at... 

A solid or liquid suspended in a gas is called an aerosol. A good example of a solid-in-gas aerosol is smoke, either from a fire or cigarette. An example of a liquid-in-gas aerosol is the liquid coming from a can of polish or paint, or the perfume emerging from an atomizer. 

A ketone is a carbonyl-containing organic molecule in which the carbonyl carbon is bonded to two carbon atoms. A familiar example of a ketone is acetone, which is often used in fingernail polish remover and is shown in Figure 12.20a. In an aldehyde, the carbonyl carbon is bonded either to one carbon atom and one hydrogen atom, as in Figure 12.20b, or, in the special case of formaldehyde, to two hydrogen atoms. 

The advantages and disadvantages of in-line microfiltration and cross-flow filtration are compared in Table 7.2. In general, in-line filtration is preferred as a polishing operation for already clean solutions, for example, to sterilize water... 

Results of commercial employment of chlorination to treat wood preserving effluents have been mixed. Treatments applied to wastewater as part of a regime that included only oil separation and flocculation-filtration generally have been of questionable value. Conversely, its use as a polishing treatment following biological oxidation has been more successful. For example,... 

A simple example of the importance of the etching process is illustrated in Figure 9.2. The freshly polished surface prior to etching will have no varia-... 

The comparative optical photo with the same magnification gives the image of a polished surface without revealing structure elements. Structure transformation has been observed after deformational and thermal influences. Acoustomicroscope method of V(Z) - curves essentially increases possibility of obtaining information about investigated materials [3]. It allows to get the specific curves, for given materials, which are connected with elastic - mechanical constant ones. The example of such dependence for carbonaceous steel is demonstrated in Fig. 2. 

For diagnostic purposes, relevant parameters are collected and logged into the control system in order to determine appropriate maintenance periods and its service timing. For example, noise and vibration can serve as indicators of the status of health for a polisher. Large pressure and temperature valuations may provide alarms for malfunctions or problems within fluid lines. Such techniques have been developed and implemented in other technical fields, such as power generation machinery. The adoption of these mature technologies significantly improves the uptime of CMP system. 

---