Zinc surface acoustic device

Zinc oxide (ZnO, wurtzite structure) eliminates oxygen on heating to form nonstoichio-metric colored phases, Zni+xO with x < 70 ppm. ZnO is almost transparent and is used as white pigment, polymer stabilizer, emollient in zinc ointments, creams and lotions, as well as in the production of Zu2Si04 for TV screens. A major application is in the rubber industry to lower the temperatures and to raise the rate of vulcanization. Furthermore, it is an n-type semiconductor (band gap 3.37 eV) and shows piezoelectric properties, making zinc oxide useful for microsensor devices and micromachined actuators. Other applications include gas sensors , solar cell windows and surface acoustic devices. ZnO has also been considered for spintronic application because of theoretical predictions of room-temperature ferromagnetism . 

Zinc oxide, ZnO, is a p-type semiconductor and shows piezoelectric properties which make this material useful for microsensor devices and micromachined actuators [69, 70]. The Al-doped material is used as a transparent electrode [71]. Other applications of ZnO include gas sensors [72], solar cell windows [73] and surface acoustic devices [74]. The organometallic compounds diethylzinc, ZnEt2 [75-77], and dimethylzinc, ZnMe2 [78], are frequently used as precursors for the deposition of zinc oxide. However, these reagents are highly pyrophoric and tend to react prematurely in the presence of water or oxygen. If ZnEt2 is combined with an alcohol in the reaction chamber, stable intermediates, presumably zinc alkoxides and/or alcohol adducts, are formed in the vapor-phase [79]. These compounds are more stable than dialkyl zinc rea-... 

Zinc oxide has been investigated already in 1912. With the beginning of the semiconductor age after the invention of the transistor [1], systematic investigations of ZnO as a compound semiconductor were performed. In 1960, the good piezoelectric properties of zinc oxide were discovered [2], which led to the first electronic application of zinc oxide as a thin layer for surface acoustic wave devices [3]. 

Zinc oxide (ZnO) is a cheap but important material with many unique properties and potential applications [123-125]. Firstly, it is a gas/pressure-sensing ceramic and can be used as non-linear varistors and sensors [126]. Secondly, piezoelectric ZnO can find applications in surface and bulk acoustic wave devices [127-129]. Thirdly, it is a semiconducting oxide with a wide band gap of 3.37 eV at room temperature and a large exciton energy of 60 meV,... 

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