UV radiation curing

To improve the thermal properties of resists and prevent thermal deformation of resist pattern profiles during the dry etching process, where the temperature of the wafer often exceeds the deformation temperature of untreated resist, UV radiation curing that results in cross-linking is sometimes used. DNQ/ novolac, poly (hydroxy styrene), acrylate, alicyclic, and a whole host of other 

Resist processing, in Microlithography Science and Technology, p. 562, Marcel Dekker (1998). 

Hiraoka and J. Pakansky, UV hardening of photo and electron beam resist patterns, J. Vac. Sci. Technol. 19, 1132 1135 (1981). 

Dammel, Diazonaphthoquinone based Resists, p. 120, SPIE Press, Bellingham, WA (1993). ibid., p. 121 B.W. Smith, Resist processing, in Microlithography Science and Technology, p. 562, Marcel Dekker, New York (1998). 

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UV-radiation curing has become a well-accepted technology which has found numerous industrial applications because of its distinct advantages 1-3. One of its main characteristics is the rapidity of the process which transforms quasi-instantly the liquid resin into a solid polymer under intense illumination by a UV-source or a laser beam4. The polymerization rate can be finely controlled by acting on the initiation rate through the intensity of the UV radiation. It is... 

Pressure-sensitive adhesives are the essential components of adhesive tapes and labels. They are polymers with permanent tack, usually applied on substrates (plastic/metal films, siliconized papers). To enhance their tack, compounds with high inherent tack are added, for example, resins, plasticizers. Pressure-sensitive adhesives reach their adhesion on the material to be bonded by contact pressure, from which the term pressure-sensitive adhesive (PSA) derives. Apart from electron radiation, also UV-radiation curing described in Section 4.3.2 is applied in adhesive tape manufacturing. The monomer molecules to be polymerized are applied, in liquid form, to the substrates to be coated by rolling and are continuously cured to a polymer layer within seconds under a UV-radiation source. Depending on their composition, predetermined adhesion values can be adjusted. The adhesive tapes can be subsumed under the systems shown in Figure 5.4 ... 

Initiator Substance triggering a chemical reaction already in low concentration, for example, photoinitiators in UV-radiation-curing adhesives. 

C. Decker, Kinetic study and new applications of UV radiation curing. Macromol. Rapid Commun. 2002, 23(18), 1067-1093. 

Decker, C, Keller, L, Zahouily, K, Benfarhi, S. 2005. Synthesis of nanocomposite polymers by UV-radiation curing. Polymer 46 6640-6648. 

Examination of the contamination of surfeces using IMS measurements was also described by Seng, who was concerned with quality control in curing of surface films. An IMS analyzer was used to detect trace amounts of coating and ink components that remained unlinked during the ultraviolet (UV) radiation curing process. ... 

Chem. Descrip. N-Vinyl-2-caprolactam, stabilized with 10 ppm N,N -di-s-butyl p-phenylenediamine CAS 2235-00-9 EINECS/ELINCS 218-787-6 Uses Reactive diluent for radical initiated UV radiation-cured inks (esp. silk screening), vinyl flooring, wood coatings, release coatings reactive diluent in polymerizations (generates polymers with more hydrophobic char, as well as adhesiveness, strength, and complexing capability) Properties Pale yel. cryst. solid vise. 3.5 cps (40 C) vapor pressure < 0.1 mm Hg (20 C) m.p. 35 C b.p. 117 C (10 mm) flash pt. 110 C V-Cap /RC [ISP]... 

Bevaloid 6002 Disparlon 1970 Patcote 513 Patcote 519 Patcote 531 Patcote 550 Patcote 577 Patcote 597 Patcote 801 Patcote 806 Patcote 811 Patcote 812 Patcote 847 Troysol 307 defoamer, UV coatings Perenol E10 UV Perenol E11 UV Perenol E12 UV Perenol E13 UV defoamer, UV radiation-cured systems EFKA -2721 defoamer, UV systems BYK -067... 

Shell Oil Co. EB/UV radiation cure of composition comprising a monoalkenyl arene/conjugated diene block copolymer, tackifying resin, and a di-tetra functional acrylate or methacrylate selected from the group consisting of acrylic and methacrylic acid esters of polyols. Improved high-temperature properties and solvent resistance. PSA properties,... 

Keywords Acrylates Crosslinking Dual cure Epoxides Glass laminates Interpenetrating polymer networks Isocyanates Photo initiated cationic polymerisation Photoinitiators Photopolymerisation Pressure sensitive adhesives Release coatings Structural adhesives Thiol/polyene UV radiation curing Vinyl ethers. 

UV-radiation curing consists basically of a photoinitiated polymerisation of multi-ftinctional monomers which are converted into a tridimensional polymer network according to the following reaction scheme [11] ... 

Decker, C., Nguyen thi viet, T., Decker, D. and Weber-koehl, E., UV-radiation curing of acrylate-epoxide systems. Polymer, 2001,42, 5531-5541. 

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