Thin-film deposition properties

Hankare, P. P. Chate, P. A. Delekar, S. D. Bhuse, V. M. Asabe, M. R. Jadhav, B. V. Garadkar, K. M. 2006. Structural and opto-electrical properties of molybdenum diselenide thin films deposited by chemical bath method. / Cryst. Growth 291 40-44. 

Puiso, J. 2004. Growth kinetics and properties of lead sulfide thin films deposited on crystalline silicon using successive ionic layer adsorption and reaction method. Ph.D. thesis. Kaunas University of Technology, Kaunas, Lithuania. 

Wang, L. Kang, S. Mu, J. 2006. Electrical properties of Ag thin films deposited by the improved SILAR method./. Dispersion Sci. Technol. 27 393-397. 

K.R. Zhang, F.R. Zhu, C.H.A. Huan, and A.T.S. Wee, Effect of hydrogen partial pressure on optoelectronic properties of indium tin oxide thin films deposited by radio frequency magnetron sputtering method, J. Appl. Phys., 86 974—980, 1999. 

J. Stotter, J. Zak, Z. Behier, Y. Show, G.M. Swain, Optical and electrochemical properties of optically transparent, boron-doped diamond thin films deposited on quartz, Anal. Chem., vol. 74, p.5924, 2002. 

B. Fausett, M. C. Granger, M.L. Hupert, J. Wang, G. M. Swain, D. M. Gruen, The electrochemical properties of nanocrystalline diamond thin-films deposited from C60/Argon and Methane/Nitrogen gas mixtures, Electroanal., vol. 12, pp. 7-15, 2000. 

This book is devoted to the properties, preparation and applications of zinc oxide (ZnO) as an transparent electrode material. It focuses on ZnO for thin film solar cell applications and hopefully inspires also readers from related fields. The book is structured into three parts to serve both as an overview as well as a data collection for students, engineers and scientists. The first part, Chaps. 1-4, provide an overview of the application and fundamental material properties of ZnO films and their surface and interfaces properties. Chaps. 5-7 review thin film deposition techniques applied for ZnO preparation on lab scale but also for large area production. Finally, Chaps. 8 and 9 are devoted to applications of ZnO in silicon- and chalcopyrite-based thin film solar cells, respectively. One should note that the application of CVD grown ZnO in silicon thin film cells is discussed earlier in Chap. 6. 

Dican, S., Caglar, Y., Caglar, M. and Yakuphanoglu, F. (2006). Electrical conductivity, optical and structural properties of indium-doped ZnO nanofiber thin film deposited by spray pyrolysis method. Phys. E35(l), 131-138. 

Metal thin films deposited on polymers are widely used in various industrial domains such as microelectronics (capacitors), magnetic recording, packaging, etc. Despite much attention that has been paid in the recent literature on the adhesive properties of metals films on polyimide (PI)( 1 - 5 ) and polyethyleneterephtalate (PET)((L) it appears that a better knowledge of the metal/polymer interface is needed. In this paper we focus ourself on the relationship between the adhesion and the structural properties of the aluminum films evaporated (or sputtered) on commercial bi-axially stretched PET (Du Pont de Nemours (Luxembourg) S.A.). A variety of treatment (corona, fluorine,etc.) have been applied in order to improve the adhesion of the metallic layer to the polymer. The crystallographic... 

Thin metal Hlms (Pt, Pd) have been used for the adsorption and detection of gases such as H2 and NH3 [138,139]. While the interaction mechanisms for these sensors were not specified, it is well known that H2 dissolves to a significant extent in Pd, with concomitant changes in the density, electrical conductivity, and mechanical properties of the fllm. The H2/Pt interaction as well as the interaction of NHa with both Pd and Pt undoubtedly involves chemisorption on surface sites. Metal thin films deposited by nearly all techniques are polycrystalline chemisorption along grain boundaries can often lead to a response that is considerably larger than predicted from the properties of metal single crystals. 

Terzini E., Thilakan P. and Minarini C., Properties of ITO thin films deposited by RF magnetron sputtering at elevated substrate temperature, Mater. Sci. Engineer. B77 (2000) pp. 110-114. 

Table 1 summarizes aU the above mentioned properties of parylene thin films deposited using CVP. 

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