Thermal processor

Gate oxide dielectrics are a cmcial element in the down-scaling of n- and -channel metal-oxide semiconductor field-effect transistors (MOSEETs) in CMOS technology. Ultrathin dielectric films are required, and the 12.0-nm thick layers are expected to shrink to 6.0 nm by the year 2000 (2). Gate dielectrics have been made by growing thermal oxides, whereas development has turned to the use of oxide/nitride/oxide (ONO) sandwich stmctures, or to oxynitrides, SiO N. Oxynitrides are formed by growing thermal oxides in the presence of a nitrogen source such as ammonia or nitrous oxide, N2O. Oxidation and nitridation are also performed in rapid thermal processors (RTP), which reduce the temperature exposure of a substrate. 

T0717 Smith Technology Corporation, SoilTech Anaerobic Thermal Processor (ATP)... 

T0831 U.S. Waste Thermal Processing, Model 100 Mobile Thermal Processor T0834 Ultrox International/U.S. Filter, Ultrox Advanced Oxidation Process... 

T0711 Shirco Infrared Systems, Inc., Shirco Infrared Thermal Destruction System T0717 Smith Technology Corporation, SoilTech Anaerobic Thermal Processor (ATP) T0719 Soil/Sediment Washing—General... 

The SoilTech anaerobic thermal processor (ATP) technology is a physical separation process that thermally desorbs organics such as polychlorinated biphenyls (PCBs) from soil and sludge. The SoilTech system distills organic contaminants from a solid matrix in an anaerobic environment, thus preventing oxidative degradation of contaminants such as PCBs into more harmful reaction products. Contaminants are collected in an oily condensate, which is disposed. 

U.S. Waste Thermal Processing Model 100 Mobile Thermal Processor Abstract... 

The Model 100 mobile thermal processor is an ex situ technology that treats soil contaminated with volatile organic compounds (VOCs). The processor treats petroleum-contaminated soil in a primary furnace and then incinerates any remaining combustibles in an afterburner. 

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