Surface analysis by laser ionization

In Surface Analysis by Laser Ionization (SALI), a probe beam such as an ion beam, electron beam, or laser is directed onto a surfiice to remove a sample of material. An untuned, high-intensity laser beam passes parallel and close to but above the sur-fiice. The laser has sufficient intensity to induce a high degree of nonresonant, and hence nonselective, photoionization of the vaporized sample of material within the laser beam. The nonselectively ionized sample is then subjected to mass spectral analysis to determine the nature of the unknown species. SALI spectra accurately reflect the surface composition, and the use of time-of-flight mass spectrometers provides fast, efficient and extremely sensitive analysis. 

In Surface Analysis by Laser Ionization (SAU) ionized and neutral atoms are sputtered from the sample surface, typically using an ion beam (like SIMS) or a... 

Surface Analysis by Laser Ionization Post-Ionization Secondary Ion Mass Spectrometry Multi-Photon Nonresonant Post Ionization Multiphoton Resonant Post Ionization Resonant Post Ionization Multi-Photon Ionization Single-Photon Ionization... 

Surface analysis by laser ionization (SALl) - See Techniques for Materials Characterization, page 12-1. 

Some less common acronyms for laser SNMS are also used, such as sputter-initiated resonance ionization spectroscopy (SIRIS) [287] and surface analysis by laser ionization (SALI) [288]. 

SALI Surface Analysis by Laser Ionization Surface e-beam, ion-beam, or laser for sputtering Sputtered atoms ionized by laser then mass analyzed 0.1-0.6 nm up to 3 pm in milling mode 60 nm Suriace analysis depth proliling 7... 

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