Hardness silicon nitrides

The very hard structural ceramics silicon carbide, SiC, and silicon nitride, Si3N4 (used for load-bearing components such as high-temperature bearings and engine... 

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Non-oxide ceramics such as silicon carbide (SiC), silicon nitride (SijN ), and boron nitride (BN) offer a wide variety of unique physical properties such as high hardness and high structural stability under environmental extremes, as well as varied electronic and optical properties. These advantageous properties provide the driving force for intense research efforts directed toward developing new practical applications for these materials. These efforts occur despite the considerable expense often associated with their initial preparation and subsequent transformation into finished products. 

Silicon carbide, SiC [1] and silicon nitride, Si3N4 [2], have been known for some time. Their properties, especially high thermal and chemical stability, hardness, high strength, and a variety of other properties have led to useful applications for both of these materials. 

Among the useful compounds of silicon are silicon carbide (carborundum) and silicon nitride, which are hard, tough materials used for making cutting tools, abrasives, and engineering... 

Current interest in saturated Si-N rings stems primarily from the industrial uses of silicon nitride (and related materials), which is a hard, chemically resistant insulator, and as precursors to silicon-nitrogen polymers (poly-silazanes). The formation and precursor chemistry of these polymers are discussed in Section 10.3.3. 

Table 3 summarizes the properties of the so-called nonmetallic hard materials, including diamond and the diamondlike carbides B4C, SiC, and Be2C. Also included in this category are comndum, A1203, cubic boron nitride, BN, aluminum nitride, AIN, silicon nitride, S N and silicon boride, SiB6 (12). 

The carbides and nitrides are well known for their hardness and strength, and this section will briefly compare a number of these properties with those of the pure metals. Concentration will be placed here on the first row compounds, since these constitute a complete series, and Mo and W, since these are the most commonly studied metals. As will be shown, the physical and mechanical properties of carbides and nitrides resemble those of ceramics not those of metals. Comparisons will be made with boron carbide (B4C), silicon carbide (SiC), aluminium nitride (AIN), silicon nitride (Si3N4), aluminium oxide (A1203), and diamond, as representative ceramic materials. 

Silicon nitride is prized for its hardness (9 out of 10 on the Mohr scale), its wear resistance, and its mechanical strength at elevated temperatures. It melts and dissociates into the elements at 1,900 °C, and has a maximum use temperature near 1,800 °C in the absence of oxygen and near 1,500 °C under oxidizing conditions.41 It also has a relatively low density (3.185 g/cm3). Unlike silicon carbide, silicon nitride is an electrical insulator. The bulk material has a relatively good stability to aggressive chemicals. This combination of properties underlies its uses in internal combustion engines and jet engines. 

Herrmann M, Klemm H, Schubert C (2000) Silicon Nitride Based Hard Materials. In Riedel R (ed) Handbook of Ceramic Hard Materials. Wiley-VCH, Weinheim, p 747... 

The bulk densities of all the materials were determined using Archimedes method (AS 1774.5, 1979). The Vickers indentation technique was used to measure the hardness in each case. The applied load in the Vickers hardness tests was 10 kg for silicon nitrides and sialons. However, using the same load produced severe lateral cracking in silicon carbides around indents, which prevented the accurate measurement of the diagonals of indents. Therefore the load was reduced to 0.3 kg for silicon carbide samples. 

Among nonoxides, silicon carbide and silicon nitride are two very important ceramics. Both are very hard and abrasive materials, and show excellent resistance to erosion and chemical attack in redudng environments. In oxidizing environments, any free silicon present in a silicon carbide or silicon nitride compact will be oxidized readily. Silicon carbide itself can also be oxidized at very high temperatures, the exact temperatures being a function of purity and... 

The effect of temperature of slurry containing ceria particles (average diameter 440 nm and lEP 8.5), on the removal rates of TEOS oxide and silicon nitride was found to be weak as seen in Figure 1. This is similar to the effect of temperature of a silica based slurry on silica pK)lishing in the temperature range of 20-50 °C for the slurry with the pad maintained between 25-30 C [2]. The pad hardness decreases with an increase in temperature [2] and the associated reduction in removal rate may have compensated for any increased chemical removal caused by the increased temperature. 

In nonoxide ceramics, nitrogen (N) or carbon (C) takes the place of oxygen in combination with silicon or boron. Specific substances are boron nitride (BN), boron carbide (B4C), the silicon borides (SiB4 and SiBg), silicon nitride (SisN4), and silicon carbide (SiC). All of these compounds possess strong, short covalent bonds. They are hard and strong, but brittle. Table 22.5 lists the enthalpies of the chemical bonds in these compounds. 

Numerous ceramics are deposited via chemical vapor deposition. Oxide, carbide, nitride, and boride films can all be produced from gas phase precursors. This section gives details on the production-scale reactions for materials that are widely produced. In addition, a survey of the latest research including novel precursors and chemical reactions is provided. The discussion begins with the mature technologies of silicon dioxide, aluminum oxide, and silicon nitride CVD. Then the focus turns to the deposition of thin films having characteristics that are attractive for future applications in microelectronics, micromachinery, and hard coatings for tools and parts. These materials include aluminum nitride, boron nitride, titanium nitride, titanium dioxide, silicon carbide, and mixed-metal oxides such as those of the perovskite structure and those used as high To superconductors. 

A comparison of critical temperature differences of resins filled with several ceramic particulates is shown in Figure 4. The volume fraction of all these composites is 34.2%. The critical temperature difference of epoxy filled with hard particulates was classified into three groups on the basis of thermal shock resistance. Composites filled with a strong particulate, such as silicon nitride or silicon carbide, showed high thermal shock resistance. Some improvement in thermal shock resistance was recognized for silica-filled composites. Composites filled with alumina or aluminum nitride showed almost comparable or lower resistance compared with the neat resin. 

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