Silicon microprobe

XPS spectra were obtained using a Perkin-Elmer Physical Electronics (PHI) 555 electron spectrometer equipped with a double pass cylindrical mirror analyzer (CMA) and 04-500 dual anode x-ray source. The x-ray source used a combination magnesium-silicon anode, with collimation by a shotgun-type collimator (1.). AES/SAM spectra and photomicrographs were obtained with a Perkin-Elmer PHI 610 Scanning Auger Microprobe, which uses a single pass CMA with coaxial lanthanum hexaboride (LaBe) electron gun. 

The consolidated titanate waste pellets are similar in appearance to their glass counterparts, i.e., both are dense, black and apparently homogeneous. Microscopic analyses, however, reveal important differences between these two waste forms. While little definitive work has been done with glassy waste forms, it is apparent that several readily soluble oxide particulates of various nuclides are simply encapsulated in the glass matrix. The titanate waste form has undergone extensive analyses which includes optical microscopy, x-ray, scanning electron microscopy, microprobe, and transmission electron microscopy (l ) The samples of titanate examined were prepared by pressure sintering and consisted of material from a fully loaded titanate column. Zeolite and silicon additions were also present in the samples. 

In order to substantiate further the mineral matter content information received from the x-ray diffraction analyses, several coke pellets were scanned for sulfur, iron, calcium, silicon, aluminum and potassium in the electron microprobe. Electron probe results showed abundant silicon, suggesting quartz (Si02), considerable aluminum, suggesting kaolinite [Ali>Sii Oii(OH)4] and, relatively speaking, little iron, sulfur, calcium, or potassium. 

The presence of organic contaminants as small as 1 /tm or films as thin as 1 /rm on silicon wafers during the manufacturing process of integrated circuits can be readily identified (38). These contaminants can affect the performance of the device and must be identified. Figure 3-8 shows the identification of possible Teflon contaminants. Other techniques, such as IR, X-ray diffraction, Auger and electron microprobe, are insensitive in identifying the nature of the contaminant. 

Figure 3-8 Raman microprobe spectrum of fluorinated hydrocarbon contaminant on silicon wafer that had been polished and plasma-etched (lower) and Raman spectrum of polytetrafluoro-ethylene (upper). Laser, 135 mW at 514.5 nm. Slits, 300 jon. Time, 0.5 s per data point. (Reproduced with permission from Adar, F., in Microelectronics Processing Inorganic Materials Characterization (L. A. Casper, ed.), ACS Symposium Series Vol. 295, pp. 230-239. American Chemical Society, Washington, D.C., 1986. Copyright 1986 American Chemical Society.)...

The Raman microprobe has been used to detect foreign bodies in various tissues (38). Figure 3-9 shows spectra of lymph node tissue of 5 pm size, which was obtained by biopsy from a patient. The foreign body was identified as a particle of silicon rubber (dimethyl siloxane). For more biological and medical applications, see Section 6.2.4. 

Chemical compositions of chondrules have been determined from extracted samples using neutron activation analysis and by in situ analysis in polished sections using electron microprobe and ion probe analysis (see e.g., Gooding et al, 1980 Grossman et al, 1988 Alexander, 1995). Chondrules typically show flat refractory abundances that are relatively close to the mean chondrite value and abundances of moderately volatile elements that scatter more widely about the mean. Type II chondrules are relatively unfractionated with near-CI levels of refractories and moderately volatile elements. However, type I chondrules show systematic depletions of moderately volatile elements and a broader spread of refractory abundances with the silicon-rich type IB chondrules being poorer in refractories than the silicon-poor type IA chondrules (Figure 18). The source of the fractionations in type I chondrules is discussed below. 

Figure 3 - Baman microprobe aectrum of a hazy film omtaminating a silicon wafer (upper trace). Reference spectra of Celluloses I and II shown below. (Reproduced with permission from Ref. 9b. Copyright 1976 John Wiley.)...

Solomon B, Koppel R, Jossiphov J Immunostaining of calmodulin and aluminium in Alzheimer s disese-affected brains. Brain Res Bull 55 253-256, 2001 Stem AJ, Perl DP, Munoz-Garcia D, et al Investigation of silicon and aluminum content in isolated senile plaque cores by laser microprobe mass analysis (LAMMA) (abstract). J Neuropathol Exp Neurol 45 361,1986 Trapp GA, Miner GD, Zimmerman RL, et al Aluminum levels in brain in Alzheimer s disease. Biol Psychiatry 13 709-718, 1978... 

Stern, A., Perl, D., Munoz-Garcia, D., Good, R., Abraham, C. and Selkoe, D. (1986) Investigation of a silicon and aluminium content in isolated senile plaque cores by laser microprobe mass analysis (LAMMA). J. Neuropathol. Exp. Neurol. 45 361. 

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