Silicon-containing resist materials based

Silicon-Containing Resist Materials Based on Chemical Ampliflcation... 

Hot gas corrosion behavior of various silicon-based non-oxide ceramic materials (e.g., silicon carbide, silicon nitride, etc.) can vary widely depending on the stoichiometry, structure and sintering aids. Silicon carbide materials exhibit excellent corrosion resistance towards sulfur-containing atmospheres even at a high temperature around 1,400X [Fdrthmann and Naoumidis, 1990]. 

The silicones (mainly polydimethyl siloxanes) are considerably more expensive than the polysulfides therefore, silicone use is restricted to more specialized applications where specific attributes of the materials are required. For example, virtually every U.S. missile or satellite contains some form of silicone sealant because of its long use life, low volatile content, and heat resistance. They are also used around aircraft windows and doors. High-temperature fuel tank sealants based on fluorocarbon-containing polysiloxanes have also been the subject of considerable government-sponsored research (21). 

Chem. Descrip. Solid silicone resin contg. phenyl groups Uses Base material for heat-resist, powd. coatings Features Good compat. with org. resins Properties Wh. to si. yish. flakes soften, pt. > 48 C Storage 12 mos min. shelf life if stored in tightly closed original containers 20-25 C... 

Sihcon-containing organic copolymers - that is, polycarbosilanes and polycar-bosiloxanes - represent a useful class of materials, due to their improved mechanical response relative to purely silicon-based polymers, high thermal and oxidative stabihty, electrical resistance, and anti-adhesive properties [79-11]. Although,... 

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