Shatter marks

On patterned copper wafers, after CMP, the surfaces are covered mainly by dielectric and copper features. The large scratches on the dielectric such as TEOS oxide will have similar shatter mark characteristics as described in Section 17.2. The scratches on the copper lines or features, however, have a very different signature. As the copper is a soft material with large plastic deformation area, it is very easy to scratch copper (Fig. 17.41). The scratches on copper usually show well-defined continuous lines. A copper scratch can be very shallow and very narrow (Fig. 17.42). It is worthwhile to point out that the extent of damage by scratch is also a function of the underlying dielectric. As a low-fe dielectric is usually much more fragile than silicon dioxide, the damage on copper lines with low-fc dielectric may be more severe (Fig. 17.43). 

The works of these practical chemists of the sixteenth century manifest a more serious appreciation of the dignity and importance of chemistry in its relation to the practical arts, and had a great stimulating influence on all chemical workers. It will be noticed however that with the exception of Paracelsus these men were not greatly interested in the problems of chemical philosophy. To the extent that they refer to chemical theory they accept the conventional Aristotelian or Arabian concepts. Paracelsus by the- impression made by his three principles indeed did much to shatter the blind faith in the ancient theories and to pave the way for later constructive speculation. In so far as chemical theory is concerned the sixteenth century marks... 

When found, the bomb should be handled with great precaution and not be turned upside down, because some bombs, (called "bombes a ren-versement ) explode on such movement. In order to prevent anybody else from such an action, the upper part of the bomb should be marked with chalk or pencil. Then the bomb is moved carefully into an excavation dug in a field, a cartridge of Dynamite or Tonite (provided with a primer and a 100 meter long piece of fuse), is placed over it and the ensemble covered with earth. Detonation of the cartridge explodes the contents of the bomb and shatters it to pieces... 

Randolph s tests with alkaline phosphatase were carried out in a stirred autoclave. An amount of the disodium salt and some water, which is required for the enzyme catalyzed hydrolysis, were placed in the autoclave along with a sealed glass ampule containing the enzyme. In this case water is necessary not just to render the enzyme active, as Klibanov found, but also to serve as a reactant in the hydrolysis. Carbon dioxide was admitted, the temperature and pressure adjusted to the level desired, and the sealed ampule shattered to expose the enzyme and to mark the zero point of the reaction sequence. In their studies they investigated the effects of changing the relative amount of enzyme on the rate of conversion of the disodium salt of p-nitrophenyl phosphoric acid to p-nitrophenol. They measured the amount of conversion by UV analysis of the solution removed from the autoclave at the end of a reaction test. The results are shown in Figure 11.1 based upon these results and other experimental results, the authors concluded that the rate-determining step of the enzyme-catalyzed reaction was the dissolution of disodium p-nitrophenyl phosphate in supercritical carbon dioxide. 

Dark red-brown liquid. M.p. —109°C, b.p. 148.5°C d 1.87. Fumes in air, and even at normal temperature shows a marked CI3 vapor pressure (decomposition). Sealed ampoules containing VCl 4 should be stored in the dark (occasionally they shatter because of high internal pressure). Decomposed by water. Soluble in cone, hydrochloric acid, ethanol and ethyl ether. 

Note Slides may be labeled with a diamond marking pencil. However, if this is done prior to immersion in liquid nitrogen, it can cause the slide to shatter, so it is preferable to remove slides from the alcohol bath briefly to label them. It may also be helpful to lightly circle the area of the slide containing the specimen on the underside. 

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