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Sensitivity of resists

Solubility of polymers in tetramethyl ammonium hydroxide aqueous solution was measured by dipping the wafer on which the polymer solution was spin-coated, for 1 min. at 25°C. The prebake was carried out at 90°C for 5min. Sensitivity of resists was measured after the exposure with CA 800(Cobilt) or KrF excimer laser(0.9mJ/cm2/1 pulse). The polymer structure was determined by iH-NMR, 13C-NMR(FX90Q apparatus,JEOL) and 2 Si-NMR. The molecular weight distribution was determined with a Toyo Soda Model 801 gel permeation chromatograph at 40°C. The four columns were connected in series, each packed with G-2000H8x3 and G-400H8(Toyo Soda polystylene gel), respectively. [Pg.136]

The conventional approach has been to take resists which were developed for electron lithography and apply them to x-ray lithography. To a first order, there is a strong correlation between the sensitivity of resist systems (positive or negative) to electron beam radiation and their corresponding sensitivity to x-ray radiation. Figure 11 shows a plot of the 20 kV electron beam sensitivity in... [Pg.84]

CP cell data are easily obtained and may be of value in a qualitative sense as an indication of the sensitivity of resistivity to pressure, but apparently are not of acceptable engineering accuracy for the design of filtration equipment. The deduction of resistivities from filtration tests is illustrated in Example 11.1. [Pg.317]

Missense mutation and positive immunohistochemistry for the p53 protein have been demonstrated in resistant ovarian carcinomas treated by cisplatin-based chemotherapy (47). This observation is essentially concordant with another study on Bcl-2 and p53 demonstrating enhanced levels of Bcl-2 and/or p53 during the progression of in vitro sensitivity of resistant cells (48). In locally advanced and metastatic breast cancer, patients with specific p53 mutations have been described to be associated with primary resistance to weekly doxorubicin (49). [Pg.182]

Herbicide resistant populations have evolved only in monoculture and/or mono-herbicide conditions at the rates we have previously predicted. Contrary to our original model, no populations of atrazine-resistant weeds have appeared in corn where rotations of crops and herbicides or herbicide mixtures were used. This is due to the previous lack of information about the greatly reduced fitness of the resistant individuals, which could be expressed only during rotational cycles, and also to the greater sensitivity of resistant individuals to other herbicides, pests and control practices. [Pg.430]

Overall, the action of NO in the sensitization of resistant tumor cells to radiotherapy seems to be linked to the normalization of the tumor vasculature and the re-oxygenation of hypoxic areas of the tumor and increased better access of immune-related cells and pro-apoptotic stimuli to the tumor and its intrinsic sensitization as well. The specific role of NO in the regulation of critical factors in the tumor cells and the tumor microenvironment such as HIF-1, VEGF, TGF-B,... [Pg.285]

NO can also act in the modulation of the immune system on the enhancement of tumor-specific immune responses and also in the sensitization of resistant tumor cells to immune-related effector mechanisms by regulating the expression of apoptosis-related genes including those bellowing to the TNF receptor family. [Pg.289]

NO Mimics Rituximab-Induced Sensitization of Resistant Tumor Cells... [Pg.466]


See other pages where Sensitivity of resists is mentioned: [Pg.53]    [Pg.138]    [Pg.288]    [Pg.49]    [Pg.665]    [Pg.406]    [Pg.17]    [Pg.113]    [Pg.211]    [Pg.336]    [Pg.239]    [Pg.406]    [Pg.351]    [Pg.624]    [Pg.64]    [Pg.283]    [Pg.286]    [Pg.289]    [Pg.64]   
See also in sourсe #XX -- [ Pg.44 , Pg.45 ]




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Resist sensitizer

Sensitivity of resist

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