Scanning electron microscope with elemental analysis capability

The electron-optical performance of the EPMA system is indistinguishable from that of a conventional scanning electron microscope (SEM) thus, EPMA combines all of the imaging capabilities of a SEM with quantitative elemental analysis using both energy- and wavelength-dispersive X-ray spectrometry. ... 

Energy-dispersive analysis of X-rays was the chosen analytical method because of its sensitivity to elements heavier than sodium, its capability of mapping elemental distribution, and its capacity for combination with a scanning electron microscope. EDS microanalysis has been reported to be suitable for the determination of mordant treatments on historical fibers (8-10) and has been used to characterize metal wrappings of combination yarns (11-13). EDS microanalysis has also been used to determine the composition of pseudomorphs and fibers in the process of mineral replacement (13, 14, 15). 

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