Rutherford backscattering characteristics

Rutherford Backscattering (RBS) provides quantitative, nondestructive elemental depth profiles with depth resolutions sufficient to satisfy many requirements however, it is generally restricted to the analysis of elements heavier than those in the substrate. The major reason for considering depth profiling using FIXE is to remove this restrictive condition and provide quantitative, nondestructive depth profiles for all elements yielding detectable characteristic X rays (i.e.,Z> 5 for Si(Li) detectors). 

SALI compares fiivorably with other major surface analytical techniques in terms of sensitivity and spatial resolution. Its major advantj e is the combination of analytical versatility, ease of quantification, and sensitivity. Table 1 compares the analytical characteristics of SALI to four major surfiice spectroscopic techniques.These techniques can also be categorized by the chemical information they provide. Both SALI and SIMS (static mode only) can provide molecular fingerprint information via mass spectra that give mass peaks corresponding to structural units of the molecule, while XPS provides only short-range chemical information. XPS and static SIMS are often used to complement each other since XPS chemical speciation information is semiquantitative however, SALI molecular information can potentially be quantified direedy without correlation with another surface spectroscopic technique. AES and Rutherford Backscattering (RBS) provide primarily elemental information, and therefore yield litde structural informadon. The common detection limit refers to the sensitivity for nearly all elements that these techniques enjoy. 

IBA techniques, which also include Rutherford backscattering spectrometry (RBS) and particle induced X-ray emission (PIXE), require the use of a particle accelerator to produce a beam of mono-energetic MeV ions which is then incident on a target. The ions may interact with atomic electrons within the target to produce characteristic X-rays or they may collide with nuclei. If an ion collides with a nucleus it may scatter, cause the nucleus to be ejected (recoiled) or undergo a nuclear reaction resulting in the emission of particles and/or y-rays. NRA involves the detection of particles or y-rays caused by nuclear reactions in the target while ERD involves the... 

Principles and Characteristics The basic and most mature method of materials analysis by energetic ion beams is elastic Rutherford backscattering spectroscopy (RBS). As it is practised today to interrogate a sample RBS uses typically a well collimated mono-energetic beam of O -particles from a Van der Graaf accelerator or from a variety of small accelerators, with energy 0 1-5 MeV [233]. The He + particles backscattered... 

Table 4.13. Main characteristics of Rutherford backscattering spectroscopy...

The heating rate of the thermal annealing used for the crystallization of the amorphous layer has a strong effect on the heterostructural characteristics of the crystalline film and therefore on the electrical properties. Figure 27.13 shows the Rutherford backscattering spectroscopy (RBS) spectra of two (Ca, Pb)Ti03 perovskite thin films prepared from the same precursor solution, but annealed at 650 °C with a relatively slow ( 8°Cs ) and a rapid ( 30°Cs ) heating rate. 

Particle- or proton-induced. X-ray emission (PIXE) is another modern powerful yet non-destructive elemental analysis technique used to determine the elemental make-up of a sample material. When a material is exposed to a particle or proton beam, atomic interactions occur that give off electromagnetic radiation of wavelengths in the X-ray part of the electromagnetic spectrum characteristic of an element. Three different types of spectra can be collected from a PIXE experiment an X-ray emission spectrum, a Rutherford (proton) backscattering spectrum and a proton transmission spectrum. 

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