Reflected electron energy-loss microscopy

A. J. Bevolo. Scanning Electron Microscopy. 1985, vol. 4, p. 1449. (Scanning Electron Microscopy, Inc. Elk Grove Village, IL) Thorough exposition of the principles and applications of reflected electron energy-loss microscopy (REELM) as well as a comparison to other techniques, such as SAM, EDS and SEM. 

REELM Reflection Electron Energy-Loss Microscopy... 

RAIS Reflection-Absorption Infrared Spectroscopy, 33 RBS Rutherford Backscattering Spectrometry, 36 REELS Reflection Electron Energy Loss Spectroscopy, 18, 34 REM Reflection Electron Microscopy ... 

While the spatial resolution of AES, XPS and SIMS continues to improve, atomic scale analysis can only be obtained by transmission electron microscopy (TEM), combined with energy dispersive X-ray spectroscopy (EDX) or electron energy loss spectroscopy (EELS). EDX detects X-rays characteristic of the elements present and EELS probes electrons which lose energy due to their interaction with the specimen. The energy losses are characteristic of both the elements present and their chemistry. Reflection high-energy electron diffraction (RHEED) provides information on surface slmcture and crystallinity. Further details of the principles of AES, XPS, SIMS and other techniques can be found in a recent publication [1]. This chapter includes the use of AES, XPS, SIMS, RHEED and TEM to study the composition of oxides on nickel, chromia and alumina formers, silicon, gallium arsenide, indium phosphide and indium aluminum phosphide. Details of the instrumentation can be found in previous reviews [2-4]. 

Fig. 1. Experimental techniques available for surface studies. SEM = Scanning electron microscopy (all modes) AES = Auger electron spectroscopy LEED = low energy electron diffraction RHEED = reflection high energy electron diffraction ESD = electron stimulated desorption X(U)PS = X-ray (UV) photoelectron spectroscopy ELS = electron loss spectroscopy RBS = Rutherford back scattering LEIS = low energy ion scattering SIMS = secondary ion mass spectrometry INS = ion neutralization spectroscopy.

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