Recent material developments for improved selectivity of SiC gas sensors

3 Recent material developments for improved selectivity of SiC gas sensors 

Not only have the cross-sensitivity issues been addressed in the development of new sensing materials and materials combinations also possible solutions have been investigated for the detection of substances (e.g. CO2 and NO2) which have not been possible to detect with the field effect sensors developed so far. Ion-conducting materials sandwiched between a porous metal gate contact and the insulator have been studied since 2000 (Nakagomi and Lloyd Spetz, 2006). Upon exposure of such structures to the target gas (e.g. 

Recently, the concept has also been utilized for the development of field effect devices sensitive to carbon dioxide (CO2) and nitrogen dioxide (NO2). By the introduction of a solid electrolyte for which, instead of oxygen anions, carbonates or nitrites/nitrates (N02 /N03 ) are incorporated in the 

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