Sensors field effect

A. Poghossian and M.J. Schoning, Silicon-based chemical and biological field-effect sensors, in Encyclopedia of Sensors (C.A. Grimes, E.C. Dickey, and M.V. Pishko, eds), Vol. 9, pp. 463-533. American Scientific Publisher, Stevenson Ranch, 2006. 

M.J. Schoning, Playing around with field-effect sensors on the basis of EIS structures, LAPS and... 

A. Poghossian, M.H. Abouzar, F. Amberger, D. Mayer, Y. Han, S. Ingebrandt, A. Offenhauser, and M.J. Schoning, Field-effect sensors with charged macromolecules characterisation by capacitance—voltage, constant capacitance, impedance spectroscopy and atomic-force microscopy methods. Biosens. Bioelectron. 22, 2100-2107 (2007). 

L.J. Bousse, N.F. de Rooij, and P. Bergveld, Operation of chemically sensitive field-effect sensors as a function of the insulator-electrolyte interface. IEEE Trans. Electron Dev. 30, 1263-1270 (1983). 

The detection principle of field-effect sensors with catalytic metal contacts is based on tbe change of the electric charge at the insulator surface caused by dissociation of the gas molecules by the catalytic material. Adsorbed gas molecules and reaction products form a polarized layer at the metal-insulator interface (Figure 2.1). This gives rise to an electric field in the insulator, which causes the concentration of mobile carriers in the semiconductor underneath the insulator to change. 

Several studies have examined the influence of film morphology on sensor behavior [109, 168-178]. Two main areas of interest are the influence of film thickness and grain size on the time scale for sensor response as well as the magnitude (sensitivity) of sensor response. Other factors that may influence the conductivity response are the nature of the semiconductor-metal device contacts, as well as charge accumulation at other device interfaces, such as the gate oxide in field effect sensor devices. 

The major part of the volumes consists of a careful description of basic sensors in Chapters 7-13. They include liquid electrolyte sensors, solid electrolyte sensors, electronic conductivity and capacitance sensors, field effect sensors, calorimetric sensors, optochemical sensors, and mass sensitive sensors. 

Design and Technology of Organic Field-Effect Sensors... 

The MIS capacitor represents the heart of most field effect sensor devices, and the physics of MIS capacitors is of importance and is treated in semiconductor physics and other sensor books (Sze, 1981 Lundstrom, 1995 Dimitrijev, 2000). Here, we will only give the basic physical principles regarding the metal insulator semiconductor field effect transistor (MISFET), since this is the ultimate transducer for commercial sensor devices. 

---