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Polishing Agent for Silicon Wafers

Here we wih focus our attention on the use of colloidal silica to make high quality concrete, as retention aid in paper making, as polishing agents for silicon wafers, to provide sohd electrolytes in lead-acid batteries and... [Pg.737]

Alkaline slurries of precipitated silicas are used as polishing agents for semiconductor silicon wafers. The mechanism of polishing is generally believed to be chemical-mechanical the high pH of the slurry leads to oxidation of the silicon surface, followed by mechanical removal of the oxidized layer under the action of the silica particles and the polishing pad. In recent years the use of precipitated silicas in this application has largely been supplanted by the use of silica sols. [Pg.600]

AI3-23126 3,5-Dimethyl-1-hexyn-3-ol EINECS 203-500-9 1-Hexyn-3-ol, 3,5-dimethyl- NSC 978 Surfynol Surlynol 61, Surfactant, wetting agent used for paper coatings. Inks, floor polishes, and glass cleaning formulations cleaner In silicon wafer industry, bp = 150° d= 0.859 08 = 1.4340. Air Products Chemicals Inc. [Pg.231]


See other pages where Polishing Agent for Silicon Wafers is mentioned: [Pg.564]    [Pg.717]    [Pg.419]    [Pg.433]    [Pg.564]    [Pg.717]    [Pg.419]    [Pg.433]    [Pg.566]    [Pg.13]    [Pg.717]    [Pg.490]    [Pg.54]    [Pg.480]    [Pg.490]    [Pg.252]    [Pg.760]    [Pg.760]    [Pg.760]    [Pg.760]    [Pg.760]    [Pg.760]    [Pg.761]    [Pg.762]    [Pg.1086]    [Pg.1337]    [Pg.1428]    [Pg.3915]    [Pg.1087]    [Pg.2087]    [Pg.586]   


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Polish/polishers

Polisher

Polishes

Polishing agents

Silicon Wafer Polishing

Silicon polishing

Silicon wafer

Wafer polishing

Wafers

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