Plasma nitridation

The AET was used at standard tests of numerous structural materials, above all steels and cast iron, prepared are ceramic samples. Part of tested samples had qjecial sur ce layer treatments by laser, plasma nitridation and similar. Effect of special surface treatment the authors published already earlier [5,6]. In this contribution are summed up typical courses of basic dependencies, measured by the AET at contact loading. 

Sexton, F. W., Plasma Nitride Anti reflection (AR) Coatings for... 

Plasma Impulse Coating Vapor Deposition (PICVD) process, 20 53 Plasma nitriding, 16 205 17 208 Plasma nitrocarburizing, case hardening by, 16 211... 

These were assigned to bulk nitride.38 This indicates that plasma nitriding takes place effectively in CH4-N2-H2 mixtures. 

In earlier work no reaction was observed to occur when metallic samples at floating potential were exposed to nitrogen discharge. It is difficult to elucidate the details of the plasma conditions used in work180 on plasma nitriding reported in the literature but two effects appear to be the probable cause of the contradictory results that have been obtained 1) impurities and 2) a low degree of nitrogen dissociation. 

Plasma oxide has found utility in high-frequency applications for dual-layer isolation,8 because of its low dielectric constant and high breakdown voltage. Also, it is in compression when deposited, so that it can be used as the dielectric when thick films (2 to 5 microns) are needed. Such thick films when deposited by thermal CVD (which is deposited in tension) tend to crack. One final advantage to the use of plasma oxide rather than plasma nitride is that... 

If desired, plasma oxide films can be doped much as the plasma nitride film we discussed earlier. In fact, doping with boron and phosphorus has been carried out as an alternative to the standard atmospheric-pressure thermal CVD process for BPSG.11 12 The latter process has the drawbacks of high defect density and poor thickness uniformity, so it was hoped that plasma BPSG would be an improvement. However, there are differences in the films in terms of H2 and N2 content, and their effect on reflow temperature, intrinsic stress and passivation effectiveness had to be examined. 

These small bicyclic molecules are very stable, show high volatility, and are ideal precursors for the deposition of "plasma nitride" from the vapour phase. In this respect the materials are valuable alternatives for the (disilyl)amines successfully introduced previously for this purpose [28,29]. 

Xia YQ, Wang SJ, Zhou F et al (2006) Tribological properties of plasma nitrided stainless steel against SAE52100 steel under ionic Uquid lubrication condition. Tribol Int 39 635-640... 

Jia ZF, Xia YQ, Li JL et al (2010) Friction and wear behavior of diamond-fike carbon coating on plasma nitrided nrild steel under boundary lubrication. Tribol Int 43 474-482... 

Plasma nitriding and/or thermal treatment of the coating-substrate system... 

J.-R. Park, Y. K. Song, K.-T. Rie and A. Gebauer, Hard coating by plasma-assited CVD on plasma nitrided stellite. Surf. Coat. Technol. 1998, 98, 1329-1335. 

A1V] X-ray diffraction, microhardness < 20 mass% Cr, plasma nitriding (H2-N2 atmospheres)... 

Goe] Fatigue tests, microhardness profiles determination Plasma nitrided chromium steels... 

Table lc.19 Influence of a plasma nitriding (PVD) on the mechanical properties of commercially Ti6A14V (Ref. 20)... 

Lanagan, J. (1988) Properties of plasma nitrided titanium alloys, Proc. of the 6th World Conf on Titanium, Vol. 4, pp. 1957-1962. 

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