Silicon nitride plasma synthesis

Hussain, T., and Ibberson, V., Synthesis of Ultrafme Silicon Nitride in an RF Plasma Reactor, in Advances in Low-Temperature Plasma Chemistry, Technology, Applications, 2 71-77, (H. Boenig, ed), Technomic, Lancaster (1984)... 

Table 8.1.5 Processing Conditions for the Synthesis of Silicon Nitride UFPs by an Inductively Coupled RF-Plasma Torch Reactor...

Kubo N, Futaki S, Shiraishi K (1987) Synthesis of ultrafine Si3N4 powder using the plasma process and powder characterisation. In Somiya S, Mitomo M, Yoshimura M (eds) Silicon Nitride I. Elsevier, London, p 93... 

Synthesis of Silicon Nitride (Si3N4) and Oxynitrides by Non-Thermal Plasma Conversion of Silane (Sil-14)... 

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