Plasma-enhanced chemical vapor deposition modification

Nowadays research efforts are mainly directed to the synthesis of microporous and dense inorganic membranes. The multilayer casting method based on sol-gel technology is not the sole approach for the preparation of these membranes. CVD and hydrothermal synthesis are currently used as well as the sol-gel process. CVI (chemical vapor infiltration) for support infiltrated membranes, PE-CVD (plasma enhanced chemical vapor deposition) for surface modification of existing membranes, growing of zeolite membrane layers, pyrolysis of polymeric preciusors have been described as alternative preparation methods... 

Plasma-Enhanced Chemical Vapor Deposition of Ultrathin Protective Films 14.3.4.1 Plasma Modification of Passive Films... 

There are numerous materials, both metallic and ceramic, that are produced via CVD processes, including some exciting new applications such as CVD diamond, but they all involve deposition on some substrate, making them fundamentally composite materials. There are equally numerous modifications to the basic CVD processes, leading to such exotic-sounding processes as vapor-phase epitaxy (VPE), atomic-layer epitaxy (ALE), chemical-beam epitaxy (CBE), plasma-enhanced CVD (PECVD), laser-assisted CVD (LACVD), and metal-organic compound CVD (MOCVD). We will discuss the specifics of CVD processing equipment and more CVD materials in Chapter 7. 

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